1. Wafer scale fabrication of carbon nanotube thin film transistors with high yield.
- Author
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Boyuan Tian, Xuelei Liang, Qiuping Yan, Han Zhang, Jiye Xia, Guodong Dong, Lianmao Peng, and Sishen Xie
- Subjects
THIN film transistors ,CARBON nanotubes ,FABRICATION (Manufacturing) ,SUBSTRATES (Materials science) ,ELECTRONICS - Abstract
Carbon nanotube thin film transistors (CNT-TFTs) are promising candidates for future high performance and low cost macro-electronics. However, most of the reported CNT-TFTs are fabricated in small quantities on a relatively small size substrate. The yield of large scale fabrication and the performance uniformity of devices on large size substrates should be improved before the CNT-TFTs reach real products. In this paper, 25 200 devices, with various geometries (channel width and channel length), were fabricated on 4-in. size ridged and flexible substrates. Almost 100% device yield were obtained on a rigid substrate with high out-put current (>8 μA/μm), high on/off current ratio (>10
5 ), and high mobility (>30 cm²/V·s). More importantly, uniform performance in 4-in. area was achieved, and the fabrication process can be scaled up. The results give us more confidence for the real application of the CNT-TFT technology in the near future. [ABSTRACT FROM AUTHOR]- Published
- 2016
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