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Your search keyword '"Kaito, T."' showing total 9 results
Start Over Author "Kaito, T." Publisher american institute of physics
9 results on '"Kaito, T."'

1. Tungsten Deposited Scanning Probe Microscope Tips for Critical Dimension Measurement.

Author

Yasutake, M., Kaito, T., and Wakiyama, S.

Subjects
*SCANNING probe microscopy, *TUNGSTEN, *ION beam lithography, *SCIENTIFIC apparatus & instruments, *MEASUREMENT, *EQUIPMENT & supplies
Abstract

We fabricated a robust and high aspect ratio tungsten deposited tip (TD tip) using a Focused Ion Beam (FIB). This tip was well controlled during fabrication. Tip diameter is uniform at around 90nm and its growing length is proportional to the irradiation time of the ion beam. Tip shape is a cylindrical pillar and aspect ratio (length/diameter) is greater than 10. Growing angle of the tip is identical to the incident angle of the ion beam. Critical dimension (CD) measurement of shallow trench isolation (STI) was performed using this tip. © 2003 American Institute of Physics [ABSTRACT FROM AUTHOR]

Published
2003
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9. A new spectroelectrochemical cell for in situ measurement of Pt and Au K-edge X-ray absorption fine structure.

Author

Kaito T, Mitsumoto H, Sugawara S, Shinohara K, Uehara H, Ariga H, Takakusagi S, and Asakura K

Abstract

A new spectroelectrochemical cell to investigate the structure of Pt/Au nanoclusters using Pt and Au K-edge X-ray absorption fine structure (XAFS) measurements under the electrochemical conditions is developed. K-edge XAFS measurements for Pt and Au require a sample as thick as 1-2 cm, which prevents homogeneous potential distribution. We can measure in situ Pt and Au K-edge XAFS spectra and determine reasonable electrochemical surface areas using our developed spectroelectrochemical cell. This work provides a new approach to analyze Pt/Au core-shell nanoclusters. The new cell is designed to be applied to both spectra with high absorption-edge energies such as the K-edge of Pt and Au and those with low absorption-edge energy such as Pt L-edge.

Published
2014
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