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Your search keyword '"Griffith, J. E"' showing total 20 results
Start Over Author "Griffith, J. E" Publisher american institute of physics
20 results on '"Griffith, J. E"'

2. Fabrication of optical fiber probes for nanometer-scale dimensional metrology.

Author

Marchman, H. M., Griffith, J. E., and Filas, R. W.

Subjects
*ELECTRONIC probes, *OPTICAL fibers, *NANOSTRUCTURED materials
Abstract

The fabrication of cylindrical probes having diameters as small as 50 nm is described in this article. The planar endface (advantageously oriented perpendicular to the axis of the cylindrical probe) and sharp 90° corners of the end portion of the probe enable accurate measurement of a feature being scanned, even at sudden jumps in the surface. Conical and flaired probes can also be fabricated with variations of this technique. The fabrication techniques described in this article are simple and inexpensive; only a Teflon beaker, optical fiber, etching solution, polymer solution, fiber cleaver, and optical microscope are necessary. [ABSTRACT FROM AUTHOR]

Published
1994
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3. A rocking beam electrostatic balance for the measurement of small forces.

Author

Miller, G. L., Griffith, J. E., Wagner, E. R., and Grigg, D. A.

Subjects
*ELECTROSTATIC accelerators, *SEMICONDUCTORS
Abstract

There exists interest in the measurement of small forces for applications such as microtopography of semiconductor devices and atomic force microscopy. A new method is introduced here in which a small silicon beam, that is acted on by the external force of interest, has its position sensed by an rf phase shift technique. The position information in turn is fed back via electrostatic forces to continuously rebalance the beam about its central support. This force-feedback approach provides high sensitivity, submillisecond response, inherent force calibration, and electronically controlled stiffness. [ABSTRACT FROM AUTHOR]

Published
1991
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5. Scanning probe tips formed by focused ion beams.

Author

Vasile, M. J., Grigg, D. A., Griffith, J. E., Fitzgerald, E. A., and Russell, P. E.

Subjects
ELECTRONIC probes, SCANNING tunneling microscopy
Abstract

Probe tips for scanning tunneling microscopy have been sharpened using focused ion beam milling. Reproducible tips were formed on polycrystalline W and Pt-Ir shanks, but this technique is not limited to these materials. The tips were found to have cone angles of 12±3° and radii of curvature as sharp as 4 nm. Focused ion beam machining allows precise control of the final shape of the tips which is important in metrology measurements of various nanostructure devices. [ABSTRACT FROM AUTHOR]

Published
1991
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