1. Structural and spectroscopic analysis of ex-situ annealed RF sputtered aluminium doped zinc oxide thin films.
- Author
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Otieno, Francis, Airo, Mildred, Erasmus, Rudolph M., Billing, David G., Quandt, Alexander, and Wamwang, Daniel
- Subjects
ALUMINUM ,ZINC oxide thin films ,RADIO frequency ,MAGNETRON sputtering ,ATOMIC force microscopy ,CRYSTALLINITY - Abstract
Aluminium doped zinc oxide thin films are prepared by Radio Frequency magnetron sputtering in pure argon atmosphere at 100W. The structural results reveal good film adhesion on a silicon substrate (001). The thin films were then subjected to heat treatment in a furnace under ambient air. The structural, morphological and optical properties of the thin films as a function of deposition time and annealing temperatures have been investigated using Grazing incidence X-Ray Diffraction (GIXRD), Atomic Force Microscopy and Scanning Electronic Microscopy. The photoluminescence properties of the annealed films showed significant changes in the optical properties attributed to mid gap defects. Annealing increases the crystallite size and the roughness of the film. The crystallinity of the films also improved as evident from the Raman and XRD studies. [ABSTRACT FROM AUTHOR]
- Published
- 2017
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