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Start Over Author "Bingjun Wu" Publisher american institute of physics, inc.
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1. Resputtering of zinc oxide films prepared by radical assisted sputtering

Author

Qiuming Song, Bingjun Wu, Bin Xie, Feng Huang, Ming Li, Haiqian Wang, Yousong Jiang, and Yizhou Song

Subjects
Coating processes -- Usage, Oxygen -- Atomic properties, Oxygen -- Electric properties, Sputtering (Physics) -- Usage, Zinc oxide -- Electric properties, Zinc oxide -- Optical properties, Physics
Abstract

The sputtering losses of the zinc oxide films prepared by radical assisted sputtering are analyzed. The resputtering caused by negative oxygen ions has dominated the sputtering loss, while diffuse deposition has played a minor role.

Published
2009

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