15 results on '"von Keudell, Achim"'
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2. Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics
3. Elementary surface processes during reactive magnetron sputtering of chromium
4. Note: Ion-induced secondary electron emission from oxidized metal surfaces measured in a particle beam reactor
5. Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces
6. Bimodal substrate biasing to control γ-Al2O3 deposition during reactive magnetron sputtering
7. Ion-induced oxidation of aluminum during reactive magnetron sputtering
8. Development of the sputtering yields of ArF photoresist after the onset of argon ion bombardment
9. Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films
10. Functional plasma polymers deposited in capacitively and inductively coupled plasmas
11. Ion-enhanced oxidation of aluminum as a fundamental surface process during target poisoning in reactive magnetron sputtering
12. Roughness evolution during a-C:H film growth in methane plasmas
13. Particle-beam experiment to study heterogeneous surface reactions relevant to plasma-assisted thin film growth and etching
14. Temperature dependence of the sticking coefficient of methyl radicals at hydrocarbon film surfaces
15. Thermal conductivity of amorphous carbon thin films
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