1. Vertically stacked coupler and serially grafted waveguide: Hybrid waveguide structures formed using an electro-optic polymer
- Author
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Michiyuki Amano, Toshio Watanabe, Satoru Tomaru, Makoto Hikita, and Yoshito Shuto
- Subjects
chemistry.chemical_classification ,Materials science ,business.industry ,Butt coupling ,Physics::Optics ,General Physics and Astronomy ,Polymer ,Waveguide (optics) ,law.invention ,Directional coupling ,Optics ,chemistry ,law ,Optical intensity ,Optoelectronics ,Reactive-ion etching ,Photolithography ,business ,Nonlinear Sciences::Pattern Formation and Solitons ,Refractive index - Abstract
Two hybrid waveguide structures formed using an electro-optic polymer are described. They are a vertically stacked coupler and a serially grafted waveguide. These structures were fabricated by spin-coating, photolithographic, and reactive ion etching processes. Directional coupling was successfully demonstrated between the vertically stacked waveguides, and the crosstalk was −15 dB. This waveguide structure was applied to an optical intensity modulator. The serially grafted waveguide allows butt coupling between the functional waveguide and passive waveguides, and the connection loss at a grafting point was as low as 0.005 dB. This waveguide structure was applied to a Mach–Zehnder optical intensity modulator and a quasi-phase-matched second-harmonic generator.
- Published
- 1998
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