1. Passive optomechanical electric field strength sensor with built-in vibration suppression
- Author
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Artur Jachimowicz, Andreas Kainz, Michael Stifter, Harald Steiner, Wilfried Hortschitz, Franz Keplinger, and Johannes Schalko
- Subjects
Work (thermodynamics) ,Materials science ,Physics and Astronomy (miscellaneous) ,Field (physics) ,Acoustics ,Field strength ,Ranging ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Vibration ,020210 optoelectronics & photonics ,Electric field ,Limit (music) ,0202 electrical engineering, electronic engineering, information engineering ,0210 nano-technology - Abstract
Methods for measuring low-frequency and static electric field strength are of great use in many areas ranging from meteorology to high-voltage infrastructure or safety. Nevertheless, all state-of-the-art methods have grave intrinsic drawbacks such as severe inherent field distortions or overpronounced temperature behavior. Recently, a method has been developed which allows for distortion-free and temperature-stable measurement. In this work, a micromechanical sensor based on this method is presented which features suspensions that suppress cross-sensitivities to vibrations. Two such types of suspensions were evaluated and compared in terms of their mechanical modes and susceptibility to electric fields and vibrations. It is shown that these suspensions indeed suppress the cross-sensitivities. The sensors exhibit field strength resolutions down to 737 V / m / Hz with a theoretical limit as low as 59.3 V / m / Hz.
- Published
- 2018