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Carbonaceous dust particles have been synthesized from benzene using an rf glow discharge. Scanning electron microscope inspection revealed that the plasma-synthesized dust particles can be classified into two types. Shell-structured dust particles showed a wide size distribution from 3 to40 μm. The other type, with different degrees of aggregation, appeared to be dense and spherical with a very distinctive yellow color and size distribution from 100 nm to 2 μm. Analyses using micro-Raman and Fourier transform infrared microscopy indicated that the main components of the dust particles are polyphenyls and hydrogenated amorphous carbon (HAC). The luminescence background in Raman spectra and the infrared C–H stretching vibrational features observed around 3.4 μm for the dust particles are attributed to HAC. The formation mechanisms and spectroscopic characterization of carbonaceous dust particles are discussed.

In this work, an approach has been adopted to explore plasma properties by combining an in situ optical emission technique with a contact angle measurement. Hydrogen plasma was generated with a radio-frequency power source. The plasma parameters such as number densities and temperatures were derived from the optical emission spectroscopic data. Small silicon chips were placed at various positions inside a discharge tube as probes for the plasma conditions. The hydrogen-plasma-treated silicon chip surfaces were characterized with the contact angle measurement method. The change of wettability on the silicon surface was observed with various plasma treatment times. The spectroscopic information about the plasma is correlated with the results of the surface characterization. It is found that the rate of the increasing hydrophilicity is sensitive to the amount of helium added and the location in the discharge tube. A simple model describing the relation between the surface coverage area of water droplet and the variation of contact angle has been established. We have proposed plasma excitation and reaction mechanisms for the observed correlation between plasma temperatures and the wettability of the silicon surface. It shows that small silicon chips can serve as “litmus tests” for the plasma conditions without introducing too much perturbation.