Author: "Shamiryan, D." / Publisher: aip publishing - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Shamiryan, D."' showing total 4 results

Start Over Author "Shamiryan, D." Publisher aip publishing

4 results on '"Shamiryan, D."'

1. Improving mechanical robustness of ultralow-k SiOCH plasma enhanced chemical vapor deposition glasses by controlled porogen decomposition prior to UV-hardening

Author: Urbanowicz, A. M., primary, Vanstreels, K., additional, Verdonck, P., additional, Shamiryan, D., additional, De Gendt, S., additional, and Baklanov, M. R., additional
Published: 2010
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2. Growth and characterization of atomic layer deposited WC0.7N0.3 on polymer films

Author: Hoyas, A. Martin, primary, Schuhmacher, J., additional, Shamiryan, D., additional, Waeterloos, J., additional, Besling, W., additional, Celis, J. P., additional, and Maex, K., additional
Published: 2003
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3. Low dielectric constant materials for microelectronics

Author: Maex, K., primary, Baklanov, M. R., additional, Shamiryan, D., additional, lacopi, F., additional, Brongersma, S. H., additional, and Yanovitskaya, Z. S., additional
Published: 2003
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4. Factors affecting an efficient sealing of porous low-kdielectrics by physical vapor deposition Ta(N) thin films

Author: Iacopi, F., primary, Tőkei, Zs., additional, Le, Q. T., additional, Shamiryan, D., additional, Conard, T., additional, Brijs, B., additional, Kreissig, U., additional, Van Hove, M., additional, and Maex, K., additional
Published: 2002
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