1. Deviations from the Paschen's law at short gap distances from 100 nm to 10 μm in air and nitrogen
- Author
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Alexis Peschot, C. Valadares, C. Poulain, Nelly Bonifaci, Olivier Lesaint, Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Laboratoire de Génie Electrique de Grenoble (G2ELab), and Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut Polytechnique de Grenoble - Grenoble Institute of Technology-Centre National de la Recherche Scientifique (CNRS)
- Subjects
Physics and Astronomy (miscellaneous) ,Atmospheric pressure ,Chemistry ,[SPI.NRJ]Engineering Sciences [physics]/Electric power ,Analytical chemistry ,chemistry.chemical_element ,Plasma ,Paschen's law ,Nitrogen ,Cathode ,law.invention ,Field electron emission ,law ,Electrode ,Breakdown voltage ,Atomic physics - Abstract
Deviations from the Paschen's law in air and nitrogen are investigated for gaps from 100 nm to 10 μm, by using a high precision electrode positioning system. The deviation is observed when electrode gaps are smaller than 4 μm at atmospheric pressure. At distances lower than 1 μm, a nearly constant average breakdown field of 350 V/μm is evidenced in both gases with Au and Ru electrodes. A metallic plasma initiated by field emission from the cathode can explain the reduction of the breakdown voltage at such low gaps. In ambient air, the existence of a pre-breakdown current is also evidenced, probably due to the presence of water adsorbed on electrodes.
- Published
- 2014
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