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2. Large ferroelectric polarization of TiN/Hf0.5Zr0.5O2/TiN capacitors due to stress-induced crystallization at low thermal budget

Author

Kim, Si Joon, primary, Narayan, Dushyant, additional, Lee, Jae-Gil, additional, Mohan, Jaidah, additional, Lee, Joy S., additional, Lee, Jaebeom, additional, Kim, Harrison S., additional, Byun, Young-Chul, additional, Lucero, Antonio T., additional, Young, Chadwin D., additional, Summerfelt, Scott R., additional, San, Tamer, additional, Colombo, Luigi, additional, and Kim, Jiyoung, additional

Published
2017
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