1. X-ray metrology and performance of a 45-cm long x-ray deformable mirror
- Author
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Nicolai Brejnholt, Lisle B. Hagler, Lisa Poyneer, Jessie Jackson, Richard Celestre, Randall Hill, and Jun Feng
- Subjects
Physics ,Photon ,business.industry ,Detector ,X-ray detector ,X-ray optics ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Deformable mirror ,Metrology ,010309 optics ,Engineering ,Optics ,Beamline ,Physical Sciences ,Chemical Sciences ,0103 physical sciences ,0210 nano-technology ,Adaptive optics ,business ,Instrumentation ,Applied Physics - Abstract
© 2016 Author(s). We describe experiments with a 45-cm long x-ray deformable mirror (XDM) that have been conducted in End Station 2, Beamline 5.3.1 at the Advanced Light Source. A detailed description of the hardware implementation is provided. We explain our one-dimensional Fresnel propagation code that correctly handles grazing incidence and includes a model of the XDM. This code is used to simulate and verify experimental results. Initial long trace profiler metrology of the XDM at 7.5 keV is presented. The ability to measure a large (150-nm amplitude) height change on the XDM is demonstrated. The results agree well with the simulated experiment at an error level of 1 μrad RMS. Direct imaging of the x-ray beam also shows the expected change in intensity profile at the detector.
- Published
- 2016
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