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Start Over Author "E. J. White" Publisher aip publishing
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1. Automatic Thin Film Vacuum Deposition System of High Stability

Author

R. L. Ramey, W. D. McLennan, E. J. White, and R. B. Brownell

Subjects
Range (particle radiation), Materials science, Optics, Vacuum deposition, business.industry, Physical vapor deposition, Repeatability, Thin film, business, Instrumentation, Pulsed laser deposition
Abstract

An automatic thin film vacuum deposition system is described which permits films of preselected thickness, in the range of 50 to 1500 A, to be deposited automatically at selected rates between 0.1 and 10 A/sec. The long time repeatability of the system lies within ±10 A of the selected thickness.

Published
1964
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