1. Strain relaxation of GaAs/Ge crystals on patterned Si substrates
- Author
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Fabio Isa, Marco Salvalaglio, M. Richter, Benito Alén, Lukasz Jakub Wewior, Philippe Niedermann, Emanuele Uccelli, Alex Dommann, Thomas Kreiliger, Claudiu V. Falub, H. von Känel, Giovanni Isella, Antonia Neels, Fulvio Mancarella, Alfonso G. Taboada, Leo Miglio, David Fuster, Ministerio de Economía y Competitividad (España), Comunidad de Madrid, Taboada, A, Kreiliger, T, Falub, C, Isa, F, Salvalaglio, M, Wewior, L, Fuster, D, Richter, M, Uccelli, E, Niedermann, P, Neels, A, Mancarella, F, Alen, B, Miglio, L, Dommann, A, Isella, G, and von Kanel, H
- Subjects
Materials science ,Photoluminescence ,Physics and Astronomy (miscellaneous) ,business.industry ,Chemical vapor deposition ,Epitaxy ,Thermal expansion ,Condensed Matter::Materials Science ,Surface coating ,Crystallography ,Lattice constant ,GaAs Ge strain relaxation Si patterned substrates ,Plasma-enhanced chemical vapor deposition ,Optoelectronics ,Metalorganic vapour phase epitaxy ,business - Abstract
Taboada, A. G. et al., We report on the mask-less integration of GaAs crystals several microns in size on patterned Si substrates by metal organic vapor phase epitaxy. The lattice parameter mismatch is bridged by first growing 2-μm-tall intermediate Ge mesas on 8-μm-tall Si pillars by low-energy plasma enhanced chemical vapor deposition. We investigate the morphological evolution of the GaAs crystals towards full pyramids exhibiting energetically stable {111} facets with decreasing Si pillar size. The release of the strain induced by the mismatch of thermal expansion coefficients in the GaAs crystals has been studied by X-ray diffraction and photoluminescence measurements. The strain release mechanism is discussed within the framework of linear elasticity theory by Finite Element Method simulations, based on realistic geometries extracted from scanning electron microscopy images. © 2014 AIP Publishing LLC., Financial support by the Swiss Federal Program Nano-Tera through projects NEXRAY and COSMICMOS and Spanish MINECO and CAM through projects EPIC-NANOTICS and Q&C Light are gratefully acknowledged.
- Published
- 2014
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