1. Stress–strain in electron-beam activated polymeric micro-actuators
- Author
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Francesco Colangelo, Davide Giambastiani, Camilla Coletti, Stiven Forti, Alessandro Tredicucci, Fabio Dispinzeri, Stefano Roddaro, and Alessandro Pitanti
- Subjects
Materials science ,Cantilever ,FOS: Physical sciences ,General Physics and Astronomy ,Applied Physics (physics.app-ph) ,macromolecular substances ,02 engineering and technology ,Dielectric ,actuators ,01 natural sciences ,law.invention ,Stress (mechanics) ,strain ,Strain engineering ,law ,Mesoscale and Nanoscale Physics (cond-mat.mes-hall) ,0103 physical sciences ,Electron beam processing ,Composite material ,Thin film ,polymers ,010302 applied physics ,Condensed Matter - Mesoscale and Nanoscale Physics ,Graphene ,Graphene, strain, electron-beam, polymers, actuators ,Stress–strain curve ,technology, industry, and agriculture ,Physics - Applied Physics ,021001 nanoscience & nanotechnology ,electron-beam ,strain engineering ,0210 nano-technology - Abstract
Actuation of thin polymeric films via electron irradiation is a promising avenue to realize devices based on strain engineered two-dimensional materials. Complex strain profiles demand a deep understanding of the mechanics of the polymeric layer under electron irradiation; in this article, we report a detailed investigation on electron-induced stress on a poly-methyl-methacrylate (PMMA) thin film material. After an assessment of stress values using a method based on dielectric cantilevers, we directly investigate the lateral shrinkage of PMMA patterns on epitaxial graphene, which reveals a universal behavior, independent of the electron acceleration energy. By knowing the stress-strain curve, we finally estimate an effective Young's modulus of PMMA on top of graphene, which is a relevant parameter for PMMA-based electron-beam lithography and strain engineering applications. Published under license by AIP Publishing.
- Published
- 2020
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