1. Texture of NiGe on Ge(001) and its evolution with formation temperature
- Author
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Siao Li Liew, Dongzhi Chi, G. K. L. Goh, Y. L. Foo, C. C. Tan, P. C. Lim, and B. Balakrisnan
- Subjects
Crystallography ,Materials science ,Physics and Astronomy (miscellaneous) ,Metallurgy ,Texture (crystalline) ,Pole figure ,Rapid thermal annealing ,Lattice mismatch - Abstract
Texture of NiGe on Ge(001) and its evolution with formation temperature have been investigated. Pole figure investigation showed that NiGe formed by rapid thermal annealing of Ni(35nm)∕Ge(001) largely consists of epitaxial grains with orientation relationships: NiGe(111)[01¯1]∕∕Ge(001)[110],NiGe(020)[001]∕∕Ge(001)[100],NiGe(201)[102¯]∕∕Ge(001)[110],NiGe(211)[011¯]∕∕Ge(001)[110],NiGe(112)[201¯]∕∕Ge(001)[110], and NiGe(210)[001]∕∕Ge(001)[100]. For NiGe formed at 400 °C, NiGe(111)[01¯1]∕∕Ge(001)[110],NiGe(020)[001]∕∕Ge(001)[100],NiGe(201)[102¯]∕∕Ge(001)[110], and NiGe(211)[011¯]∕∕Ge(001)[110] were found to be the preferred orientations, while NiGe formed at 600 °C was dominated by NiGe grains with NiGe(111)[01¯1]∕∕Ge(001)[110] orientation. The increasing dominance of the grains with NiGe(111)[01¯1]∕∕Ge(001)[110] orientation is attributed to the minimum lattice mismatch with this orientation.
- Published
- 2005
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