1. Microfabrication of High Resolution X-ray Magnetic Calorimeters
- Author
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Wen-Ting Hsieh, Simon R. Bandler, Daniel P. Kelly, Jan P. Porst, Hannes Rotzinger, George M. Seidel, Thomas R. Stevenson, Betty Young, Blas Cabrera, and Aaron Miller
- Subjects
Magnetization ,Materials science ,Fabrication ,business.industry ,Sputtering ,Resolution (electron density) ,Optoelectronics ,Absorption (electromagnetic radiation) ,business ,Particle detector ,Microfabrication ,Calorimeter - Abstract
Metallic magnetic calorimeter (MMC) is one of the most promising x‐ray detector technologies for providing the very high energy resolution needed for future astronomical x‐ray imaging spectroscopy. For this purpose, we have developed micro‐fabricated 5×5 arrays of MMC of which each individual pixel has excellent energy resolution as good as 3.4 eV at 6 keV x‐ray. Here we report on the fabrication techniques developed to achieve good resolution and high efficiency. These include: processing of a thin insulation layer for strong magnetic coupling between the AuEr sensor film and the niobium pick‐up coil; production of overhanging absorbers for enhanced efficiency of x‐ray absorption; fabrication on SiN membranes to minimize the effects on energy resolution from athermal phonon loss. We have also improved the deposition of the magnetic sensor film such that the film magnetization is nearly completely that is expected from the AuEr sputter target bulk material. In addition, we have included a study of a posit...
- Published
- 2009