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We have studied the morphology, structure and superconducting properties high Tc oxide films, mostly in the Y‐Ba‐Cu‐O sytem, prepared by various sputtering techniques (diode and magnetron sputtering) and molecular beam epitaxy (MBE). In the as‐deposited condition the chemical homogeneity both across the film and through the thickness is excellent as measured by Rutherford backscattering spectrometry (RBS). Post oxygen annealing at temperature above 800°C yields the orthorhombic superconducting phase as revealed by the x‐ray diffraction. High‐quality epitaxially grown Y1Ba2Cu3O7−x films deposited on single‐crystal SrTiO3 substrates with various orientations were obtained with a narrow rocking curve (

Localized moments and magnetic interactions have been studied in the Fe‐doped layer compounds FexTaSe2 and FexNbSe2 for .01

We have used metal molecular beam epitaxy, sputter deposition with single composite target, and spin‐on/pyrolysis with metallo‐organic precursors to prepare thin films of high Tc oxide superconductors mostly in the Y‐Ba‐Cu‐O system. We report the superconducting properties and the structural characteristics of the films. The processing parameters of these thin‐film techniques are also discussed.