1. A broadband, capacitive, surface-micromachined, omnidirectional microphone with more than 200 kHz bandwidth
- Author
-
Neal A. Hall and Michael L. Kuntzman
- Subjects
Frequency response ,Materials science ,Acoustics and Ultrasonics ,Arts and Humanities (miscellaneous) ,Microphone ,Capacitive sensing ,Acoustics ,Noise-canceling microphone ,Bandwidth (signal processing) ,Sound pressure ,Capacitance ,Charge amplifier - Abstract
A surface micromachined microphone is presented with 230 kHz bandwidth. The structure uses a 2.25 μm thick, 315 μm radius polysilicon diaphragm suspended above an 11 μm gap to form a variable parallel-plate capacitance. The back cavity of the microphone consists of the 11 μm thick air volume immediately behind the moving diaphragm and also an extended lateral cavity with a radius of 504 μm. The dynamic frequency response of the sensor in response to electrostatic signals is presented using laser Doppler vibrometry and indicates a system compliance of 0.4 nm/Pa in the flat-band of the response. The sensor is configured for acoustic signal detection using a charge amplifier, and signal-to-noise ratio measurements and simulations are presented. A resolution of 0.80 mPa/√Hz (32 dB sound pressure level in a 1 Hz bin) is achieved in the flat-band portion of the response extending from 10 kHz to 230 kHz. The proposed sensor design is motivated by defense and intelligence gathering applications that require broadband, airborne signal detection.
- Published
- 2014