1. Process, Circuit and System Co-optimization of Wafer Level Co-Integrated FinFET with Vertical Nanosheet Selector for STT-MRAM Applications
- Author
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Philippe Matagne, M. Perumkunnil, F. Yasin, Gouri Sankar Kar, Anabela Veloso, Julien Ryckaert, Arnaud Furnemont, Alessio Spessot, Sushil Sakhare, Anda Mocuta, D. Crotti, and T. Huynh-Bao
- Subjects
010302 applied physics ,Magnetoresistive random-access memory ,business.industry ,Computer science ,Transistor ,020207 software engineering ,02 engineering and technology ,01 natural sciences ,law.invention ,Reduction (complexity) ,CMOS ,law ,Megabit ,0103 physical sciences ,0202 electrical engineering, electronic engineering, information engineering ,Wafer ,business ,Computer hardware ,Nanosheet - Abstract
We present for the first time a co-integrated FinFET with vertical nanosheet transistor (VFET) process on a 300 mm silicon wafer for STT-MRAM applications and its related avenues with a holistic design-technology-co-optimization (DTCO) and power-performance-area-cost (PPAC) approach. The STT-MRAM bitcell and a 2 Mbit macro have been optimized and designed to address the viability of the co-integration process and advantages of vertical channel transistors for STT-MRAM selectors. An architectural system simulator GEM5 has been also employed with Polybench workloads to assess energy saving at system-level. In order to enable this co-integration, four extra masks are required, which costs below 10% in embedded chips. A 36% area reduction can be achieved for the STT-MRAM bitcell implemented with VFET selectors. With a UVLT flavor, the STT-MRAM bitcell comprising of 3-nanosheet could deliver the same performance of the 4-fin LVT FinFET selector. A 2 Mbit STT-MRAM macro designed with VFET selector can offer a 17% and a 21% reduction for read access latency and energy per operation respectively, and a 10% for write energy per operation. A 7% energy saving for the STT-MRAM L2 cache using VFET selector has been observed at the system level with Polybench workloads. more...
- Published
- 2019
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