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Next-generation nano and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by interface quality or precise chemical or dopant composition. Here we present the first phase-sensitive extreme ultraviolet imaging reflectometer. It combines the excellent phase stability of coherent high-harmonic sources, the unique chemical- and phase-sensitivity of extreme ultraviolet reflectometry, and state-of-the-art ptychography imaging algorithms. This tabletop microscope can non-destructively probe surface topography, layer thicknesses, and interface quality, as well as dopant concentrations and profiles. High-fidelity imaging was achieved by implementing variable-angle ptychographic imaging, by using total variation regularization to mitigate noise and artifacts in the reconstructed image, and by using a high-brightness, high-harmonic source with excellent intensity and wavefront stability. We validate our measurements through multiscale, multimodal imaging to show that this technique has unique advantages compared with other techniques based on electron and scanning-probe microscopies., Comment: 47 pages, 16 figures (4 in main text, 12 supplement) 2 tables

We show how bright, fully coherent, hard x-ray beams can be generated through nonlinear upconversion of femtosecond laser light. By using longer-wavelength mid-infrared driving lasers of moderate peak intensity, full phase matching of the high harmonic generation process can extend, in theory, into the hard x-ray region of the spectrum. We identify the dominant phase matching mechanism for long wavelength driving lasers, and verify our predictions experimentally by demonstrating phase-matched up-conversion into the soft x-ray region of the spectrum around 330 eV using an extended, high-pressure, gas medium that is weakly ionized by the laser. Scaling of the overall conversion efficiency is surprisingly favorable as the wavelength of the driving laser is increased, making useful, fully coherent, multi-keV x-ray sources feasible. Finally, we show that the rapidly decreasing microscopic single-atom yield at longer driving wavelengths is compensated macroscopically by an increasing optimal pressure for phase matching and a rapidly decreasing reabsorption of the generated light at higher photon energies., Comment: 43 pages, 8 figures, 1 table