1. Role of surface treatment in laser damage of germanium
- Author
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G. Vitali, L. Muzii, M Bertolotti, Luigi Stagni, Bertolotti, M, Stagni, Luigi, Vitali, G, and Muzi, L.
- Subjects
Surface (mathematics) ,Materials science ,business.industry ,education ,technology, industry, and agriculture ,General Physics and Astronomy ,chemistry.chemical_element ,Germanium ,equipment and supplies ,law.invention ,Optics ,Semiconductor ,Optical microscope ,chemistry ,Laser damage ,law ,business ,Laser light - Abstract
The interaction of laser light with a semiconductor surface is studied by means of an optical microscope. The surface treatment is shown to affect the nature of the damage. On lapped surfaces the damage is found to consist essentially of a removal of matter from the semiconductor surface, while on etched surfaces it is mainly limited to the occurence of melting. A qualitative explanation of these differences in behavior is given.The interaction of laser light with a semiconductor surface is studied by means of an optical microscope. The surface treatment is shown to affect the nature of the damage. On lapped surfaces the damage is found to consist essentially of a removal of matter from the semiconductor surface, while on etched surfaces it is mainly limited to the occurence of melting. A qualitative explanation of these differences in behavior is given.
- Published
- 1971