1. Experimental observation of electron bounce resonance through electron energy distribution measurement in a finite size inductively coupled plasma
- Author
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Yoon Min Chang, Deuk Chul Kwon, Hyun Ju Kang, Chin-Wook Chung, Seuli Gu, and Yu Sin Kim
- Subjects
Physics ,Resonance ,Electron ,Condensed Matter Physics ,Plateau (mathematics) ,01 natural sciences ,010305 fluids & plasmas ,Planar ,Distribution (mathematics) ,Physics::Plasma Physics ,0103 physical sciences ,Inductively coupled plasma ,Diffusion (business) ,Atomic physics ,010306 general physics ,Energy (signal processing) - Abstract
The electron bounce resonance was experimentally investigated in a low pressure planar inductively coupled plasma. The electron energy probability functions (EEPFs) were measured at different chamber heights and the energy diffusion coefficients were calculated by the kinetic model. It is found that the EEPFs begin to flatten at the first electron bounce resonance condition, and the plateau shifts to a higher electron energy as the chamber height increases. The plateau which indicates strong electron heating corresponds not only to the electron bounce resonance condition but also to the peaks of the first component of the energy diffusion coefficients. As a result, the plateau formation in the EEPFs is mainly due to the electron bounce resonance in a finite inductive discharge.
- Published
- 2016
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