Search

Optical emission spectroscopic (OES) measurements are acquired by collecting absolute line and continuum emission from a hydrogen/methane plasma (300 sccm H2, 3 sccm CH4, 40–70 torr, 1600–3200 W) used for diamond deposition. The experimental results are used in tandem with numerical modeling to infer plasma parameters of interest. Numerical solutions for a microwave chemical vapor deposition (CVD) reactor are generated by coupling solutions of the Boltzmann equation and the electron energy equation to a collisional-radiative model (CRM). Results indicate that the electron-neutral free-free emission, which depends strongly on neutral density, electron density, and electron temperature, is the dominant source of continuum emission. All numerical solutions are found to be inconsistent with the experimentally measured continuum emission. A meaningful interpretation, however, is possible if the electron-H2 cross-section, used for calculating electron-neutral free-free continuum emission, is increased by between 4 and 20 above the momentum cross-section value. We believe that such an increase is justified because of enhanced energy exchange in electron-molecule interactions.

A numerical study has been conducted to assess the viability of a new sealing mechanism for gas and steam turbines. This new static-to-rotating sealing mechanism is mounted on flexible legs which permit radial movement and is designed to take advantage of the hydro-dynamic pressure forces, which result from fluid leaking around the seal, to maintain an ideally small and constant clearance. Relatively simple seal geometries have been numerically tested to find an optimal shape. These results indicate that a substantial sealing improvement (between two and four times less leakage) relative to a labyrinth seal is possible. Although these results show that a brush seal is more effective than the present seal, the present seal is designed to operate in high-speed and high-temperature environments in which the brush seal would degrade.