Author: "Tel, W. T." / Publication Year Range: Last 50 years - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Tel, W. T."' showing total 8 results

Start Over Author "Tel, W. T." Publication Year Range Last 50 years

8 results on '"Tel, W. T."'

1. Efficient hybrid metrology for focus, CD, and overlay

Author: Tel, W. T., additional, Segers, B., additional, Anunciado, R., additional, Zhang, Y., additional, Wong, P., additional, Hasan, T., additional, and Prentice, C., additional
Published: 2017
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2. Verification and application of multi-source focus quantification

Author: Simiz, J.-G., additional, Hasan, T., additional, Staals, F., additional, Le-Gratiet, B., additional, Tel, W. T., additional, Prentice, C., additional, Gemmink, J.-W., additional, Tishchenko, A., additional, and Jourlin, Y., additional
Published: 2016
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3. Product layout induced topography effects on intrafield levelling

Author: Simiz, J.-G., additional, Hasan, T., additional, Staals, F., additional, Le-Gratiet, B., additional, Tel, W. T., additional, Prentice, C., additional, and Tishchenko, A., additional
Published: 2015
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4. Predictability and impact of product layout induced topology on across-field focus control

Author: Simiz, J.-G., additional, Hasan, T., additional, Staals, F., additional, Le-Gratiet, B., additional, Gilgenkrantz, P., additional, Villaret, A., additional, Pasqualini, F., additional, Tel, W. T., additional, Prentice, C., additional, and Tishchenko, A., additional
Published: 2015
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5. Efficient hybrid metrology for focus, CD, and overlay

Author: Sanchez, Martha I., Ukraintsev, Vladimir A., Tel, W. T., Segers, B., Anunciado, R., Zhang, Y., Wong, P., Hasan, T., and Prentice, C.
Published: 2017
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6. Verification and application of multi-source focus quantification

Author: Capodieci, Luigi, Cain, Jason P., Simiz, J.-G., Hasan, T., Staals, F., Le-Gratiet, B., Tel, W. T., Prentice, C., Gemmink, J.-W., Tishchenko, A., and Jourlin, Y.
Published: 2016
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7. Product layout induced topography effects on intrafield levelling

Author: Behringer, Uwe F.W., Finders, Jo, Simiz, J.-G., Hasan, T., Staals, F., Le-Gratiet, B., Tel, W. T., Prentice, C., and Tishchenko, A.
Published: 2015
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8. Predictability and impact of product layout induced topology on across-field focus control

Author: Cain, Jason P., Sanchez, Martha I., Simiz, J.-G., Hasan, T., Staals, F., Le-Gratiet, B., Gilgenkrantz, P., Villaret, A., Pasqualini, F., Tel, W. T., Prentice, C., and Tishchenko, A.
Published: 2015
Full Text: View/download PDF

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