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The fluid description is widely used for the multi-dimensional modeling of low temperature plasmas with complex chemistries due to their relative low computational cost. It relies, however, on a series of simplifying assumptions and some truncation of the moment equations for describing the non-equilibrium between the electrons, positive ions, negative ions, and the neutrals. In this paper, the classical assumption of isothermal negative ions is revisited for electronegative plasmas and, more particularly, for the fluid modeling of the transition between the plasma and its sheath. To do so, and in contrast to previous studies, the energy balance equation for the negative ions is also computed, and it allows us to derive the polytropic coefficient γ of the negative ions in addition to one of the positive ions. Strong variations in the sheath and presheath of the negative ions temperature and their polytropic coefficient are observed. The polytropic coefficient is shown to be a strongly varying function of space having for consequence that the negative ions are isothermal only in a very narrow extension of the presheath. For the case considered in this paper, both positive and negative ion flows are nearly adiabatic at the sheath-edge and become adiabatic inside the sheath. This paper shows that classical fluid modeling assumptions need to be verified for each system under consideration, most particularly while modeling the transition from plasma to a wall. [ABSTRACT FROM AUTHOR]

In negative ion sources for the ITER Neutral Beam Injection system, the co-extraction of electrons is one of the main limiting factors. The current of co-extracted electrons can be decreased by applying a positive bias voltage to the Plasma Grid (PG) with respect to its source walls. Simulations using three-dimensional Particle-in-Cell Monte Carlo Collision (3D-PIC MCC) model are a powerful tool for studying the extraction region of such ion sources. However, the inclusion of both PG and source walls in the simulation domain is difficult due to numerical constraints. This study uses the 3D-PIC MCC code ONIX to explore the effects of particle injection models on plasma characteristics, using a flux injection model to regulate particle influx for a flat transition in potential from the bulk plasma to the simulation domain. Biasing of the PG above floating potential is possible using the flux injection scheme and results in a notable reduction in co-extracted electrons, corroborating with established experimental observations. [ABSTRACT FROM AUTHOR]

Population densities of excited states of argon atoms in a high power impulse magnetron sputtering (HiPIMS) discharge are examined using a global discharge model and a collisional-radiative model. Here, the ionization region model (IRM) and the Orsay Boltzmann equation for electrons coupled with ionization and excited states kinetics (OBELIX) model are combined to obtain the population densities of the excited levels of the argon atom in a HiPIMS discharge. The IRM is a global plasma chemistry model based on particle and energy conservation of HiPIMS discharges. OBELIX is a collisional-radiative model where the electron energy distribution is calculated self-consistently from an isotropic Boltzmann equation. The collisional model constitutes 65 individual and effective excited levels of the argon atom. We demonstrate that the reduced population density of high-lying excited argon states scales with (p *) − 6 , where p * is the effective quantum number, indicating the presence of a multistep ladder-like excitation scheme, also called an excitation saturation. The reason for this is the dominance of electron impact processes in the population and de-population of high-lying argon states in combination with a negligible electron–ion recombination. [ABSTRACT FROM AUTHOR]

The magnetic field is a key feature that distinguishes magnetron sputtering from simple diode sputtering. It effectively increases the residence time of electrons close to the cathode surface and by that increases the energy efficiency of the discharge. This becomes apparent in high power impulse magnetron sputtering (HiPIMS) discharges, as small changes in the magnetic field can result in large variations in the discharge characteristics, notably the peak discharge current and/or the discharge voltage during a pulse. Here, we analyze the influence of the magnetic field on the electron density and temperature, how the discharge voltage is split between the cathode sheath and the ionization region, and the electron heating mechanism in a HiPIMS discharge. We relate the results to the energy efficiency of the discharge and discuss them in terms of the probability of target species ionization. The energy efficiency of the discharge is related to the fraction of pulse power absorbed by the electrons. Ohmic heating of electrons in the ionization region leads to higher energy efficiency than electron energization in the sheath. We find that the electron density and ionization probability of the sputtered species depend largely on the discharge current. The results suggest ways to adjust electron density and electron temperature using the discharge current and the magnetic field, respectively, and how they influence the ionization probability. [ABSTRACT FROM AUTHOR]