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This paper presents a novel heterodyne grating interferometer designed to meet the precise measurement requirements of next-generation lithography systems and large-scale atomic-level manufacturing. Utilizing a dual-frequency light source, the interferometer enables simultaneous measurement of three degrees of freedom. Key advancements include a compact zero Dead-Zone optical path configuration, significantly enhancing measurement reliability by mitigating the impact of light source fluctuations and air refractive index variations. A comprehensive crosstalk error analysis was conducted, resulting in a robust correction algorithm that reduces errors to below 5%. Performance testing of the prototype, size of 90mm*90mm*40mm, demonstrated exceptional resolution (0.25 nm in the XY-axis and 0.3 nm in the Z-axis), superior linearity (6.9e-5, 8.1e-5 and 16.2e-5 for the X, Y, and Z axes, respectively), high repeatability (0.8 nm/1000 nm for the three axes) and stability (20 nm for the XY-axis and 60 nm for the Z-axis over 1000 seconds). Comparative analysis with existing measurement sensors highlights the proposed method's significant advantages in integration, multidimensional capabilities, and is expected to be widely used in fields such as integrated circuits, atomic-level manufacturing and aerospace technology., Comment: 8 pages,11 figures

The downlink channel state information (CSI) estimation and low overhead acquisition are the major challenges for massive MIMO systems in frequency division duplex to enable high MIMO gain. Recently, numerous studies have been conducted to harness the power of deep neural networks for better channel estimation and feedback. However, existing methods have yet to fully exploit the intrinsic correlation features present in CSI. As a consequence, distinct network structures are utilized for handling these two tasks separately. To achieve joint channel estimation and feedback, this paper proposes an encoder-decoder based network that unveils the intrinsic frequency-domain correlation within the CSI matrix. The entire encoder-decoder network is utilized for channel compression. To effectively capture and restructure correlation features, a self-mask-attention coding is proposed, complemented by an active masking strategy designed to improve efficiency. The channel estimation is achieved through the decoder part, wherein a lightweight multilayer perceptron denoising module is utilized for further accurate estimation. Extensive experiments demonstrate that our method not only outperforms state-of-the-art channel estimation and feedback techniques in joint tasks but also achieves beneficial performance in individual tasks., Comment: 10 pages