Author: "Gian Lorusso" / Publication Year Range: Last 3 years - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Gian Lorusso"' showing total 4 results

Start Over Author "Gian Lorusso" Publication Year Range Last 3 years

4 results on '"Gian Lorusso"'

1. Direct yield prediction from SEM images

Author: Choona, Lilach, primary, Linshiz, Jasmine, additional, Pres, Shaul, additional, Levant, Boris, additional, Tal, Noam, additional, Santoro, Gaetano, additional, Baudot, Sylvain, additional, Opdebeeck, Ann, additional, Reifsnider, Jason, additional, Vadakupudhu Palayam, Senthil, additional, Gian, Lorusso, additional, Mitard, Jerome, additional, and Yogev, Shay, additional
Published: 2023
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2. Frequency-informed deep-learning denoising method supporting sub-nm metrology for high NA EUV lithography

Author: Minjung Kim, Dorin Cerbu, Selim Dogru, Kumara Sastry, Gian Lorusso, Mohamed Zidan, Mohamed Saib, Joren Severi, Danilo De Simone, and Vivek K. Singh
Published: 2023

3. Probabilistic process window: a new approach to focus-exposure analysis

Author: Chris A. Mack, Jonathan Yannuzzi, Gian Lorusso, Mohamed Zidan, Danilo De Simone, Ataklti Weldeslassie, Nadia Vandenbroeck, Philippe Foubert, Christophe Beral, and Anne-Laure Charley
Published: 2022

4. E-beam metrology-based EUVL aberration monitoring

Author: Seul-ki Kang, Yuji Miura, Kotaro Maruyama, Yuichiro Yamazaki, Chih-I Wei, Ethan Macguire, Germain Fenger, Peter De Bisschop, Sayantan Das, Sandip Halder, and Gian Lorusso
Published: 2022

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