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An experimental study of the plasma gas phase in low pressure radiofrequency discharges of oxygen is presented. The plasma phase has been studied by means of mass spectroscopy of the neutral and of the charged species, directly sampling the plasma gas phase. We also measured the ion energy distributions. We have studied the influence of the operating conditions on the plasma gas-phase composition. Ion density and energy have been measured as a function of discharge parameters. In particular, we have identified operating conditions in low pressure discharges allowing the extraction of ions from the plasma state with energies exceeding 50 eV. This makes plasma processing with energetic oxygen ions feasible in our device.

We study pentane depletion using a hybrid plasma system based on a surface dielectric barrier discharge (SDBD), with and without a catalyst, and as a function of plasma power and alkane concentration. We evaluate pentane decomposition efficiency based on plasma power and quantify the role of the catalyst in the resulting depletion of intermediate products. Analyses of the temporal evolution of pentane and the intermediate decomposition products allow us to estimate the corresponding decomposition rates according to the plasma parameters. We find that depletion efficiency increases as a function of pentane concentration. Furthermore, it is shown that the catalytic processes are responsible for a significant increase in the depletion rates of the intermediate reaction products, thus contributing to the total abatement process of pentane.