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2. SEM overlay target design using e-beam simulation

Author

Houchens, Kevin, primary, Abramovitz, Yaniv, additional, Attal, Shay, additional, Adan, Ofer, additional, Bomshtein, Nahum, additional, Buks, Itai, additional, Hsieh, Ryan, additional, Itzkovich, Tal, additional, and Perry, Jenny, additional

Published
2023
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3. Recess metrology challenges for 3D device architectures in advanced technology nodes

Author

Santoro, Gaetano, primary, Houchens, Kevin, additional, Bogdanowicz, Janusz, additional, Elizov, Moshe, additional, Yaron, Lior, additional, Chemama, Michael, additional, Goldenshtein, Alex, additional, Zakay, Amit, additional, Amit, Noam, additional, Briggs, Basoene, additional, Pacco, Antoine, additional, Delhougne, Romain, additional, Cockburn, Andrew, additional, Abramovitz, Yaniv, additional, Tam, Aviram, additional, Adan, Ofer, additional, Mertens, Hans, additional, Charley, Anne-Laure, additional, Horiguchi, Naoto, additional, Leray, Philippe, additional, and Lorusso, Gian F., additional

Published
2022
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4. Recess metrology challenges for 3D device architectures in advanced technology nodes

Author

Robinson, John C., Sendelbach, Matthew J., Santoro, Gaetano, Houchens, Kevin, Bogdanowicz, Janusz, Elizov, Moshe, Yaron, Lior, Chemama, Michael, Goldenshtein, Alex, Zakay, Amit, Amit, Noam, Briggs, Basoene, Pacco, Antoine, Delhougne, Romain, Cockburn, Andrew, Abramovitz, Yaniv, Tam, Aviram, Adan, Ofer, Mertens, Hans, Charley, Anne-Laure, Horiguchi, Naoto, Leray, Philippe, and Lorusso, Gian Francesco

Published
2022
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