1. Three-dimensional imaging of integrated-circuit activity using quantum defects in diamond
- Author
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Garsi, Marwa, Stöhr, Rainer, Denisenko, Andrej, Shagieva, Farida, Trautmann, Nils, Vogl, Ulrich, Sene, Badou, Kaiser, Florian, Zappe, Andrea, Reuter, Rolf, and Wrachtrup, Jörg
- Subjects
Physics - Applied Physics ,Condensed Matter - Mesoscale and Nanoscale Physics ,Quantum Physics - Abstract
The continuous scaling of semiconductor-based technologies to micron and sub-micron regimes has resulted in higher device density and lower power dissipation. Many physical phenomena such as self-heating or current leakage become significant at such scales, and mapping current densities to reveal these features is decisive for the development of modern electronics. However, advanced non-invasive technologies either offer low sensitivity or poor spatial resolution and are limited to two-dimensional spatial mapping. Here we use near-surface nitrogen-vacancy centres in diamond to probe Oersted fields created by current flowing within a multi-layered integrated circuit in pre-development. We show the reconstruction of the three-dimensional components of the current density with a magnitude down to about $\approx 10 \,\rm \mu A / \mu m^2$ and sub-micron spatial resolution at room temperature. We also report the localisation of currents in different layers and observe anomalous current flow in an electronic chip. Our method provides, therefore a decisive step toward three-dimensional current mapping in technologically relevant nanoscale electronics chips., Comment: Featured in Parker, M., Imaging circuits in three dimensions. Nat Electron 7, 94 (2024)
- Published
- 2021
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