1. Integrated Waveguides in Nanoporous Alumina Membrane for Millimeter-Wave Interposer
- Author
-
Ariana L. C. Serrano, Julio M. Pinheiro, Darine Kaddour, Rogerio C. A. Alvarenga, Philippe Ferrari, Noureddine Kabbani, Matthieu Bertrand, Emmanuel Pistono, Leonardo G. Gomes, Vincent Puyal, Gustavo P. Rehder, Laboratory of Microelectronics USP, Universidade de São Paulo (USP), Laboratoire de Conception et d'Intégration des Systèmes (LCIS), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Université Grenoble Alpes (UGA), Laboratoire d'Electronique et des Technologies de l'Information (CEA-LETI), Université Grenoble Alpes (UGA)-Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Techniques of Informatics and Microelectronics for integrated systems Architecture (TIMA), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP)-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés (TIMA), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes [2016-2019] (UGA [2016-2019]), Universidade de São Paulo ( USP ), Laboratoire de Conception et d'Intégration des Systèmes ( LCIS ), Institut polytechnique de Grenoble - Grenoble Institute of Technology ( Grenoble INP ) -Université Grenoble Alpes ( UGA ), Équipe MIcro et Nanosystèmes pour les Communications sans fil ( LAAS-MINC ), Laboratoire d'analyse et d'architecture des systèmes [Toulouse] ( LAAS ), Centre National de la Recherche Scientifique ( CNRS ) -Université Toulouse III - Paul Sabatier ( UPS ), Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse ( INSA Toulouse ), Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Institut National Polytechnique [Toulouse] ( INP ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Toulouse III - Paul Sabatier ( UPS ), Institut National des Sciences Appliquées ( INSA ) -Institut National des Sciences Appliquées ( INSA ) -Institut National Polytechnique [Toulouse] ( INP ), Techniques of Informatics and Microelectronics for integrated systems Architecture ( TIMA ), Université Joseph Fourier - Grenoble 1 ( UJF ) -Institut polytechnique de Grenoble - Grenoble Institute of Technology ( Grenoble INP ) -Institut National Polytechnique de Grenoble ( INPG ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Grenoble Alpes ( UGA ), and Universidade de São Paulo = University of São Paulo (USP)
- Subjects
Materials science ,Nanoporous ,business.industry ,Coplanar waveguide ,Nanowire ,020206 networking & telecommunications ,02 engineering and technology ,Condensed Matter Physics ,[ SPI.TRON ] Engineering Sciences [physics]/Electronics ,law.invention ,[SPI.TRON]Engineering Sciences [physics]/Electronics ,law ,Attenuation coefficient ,Extremely high frequency ,0202 electrical engineering, electronic engineering, information engineering ,Interposer ,Optoelectronics ,Electrical and Electronic Engineering ,Photolithography ,business ,Waveguide ,ComputingMilieux_MISCELLANEOUS - Abstract
The integration of rectangular waveguides inside a nanoporous alumina membrane is proposed in this letter. The horizontal copper plates are realized by a photolithography process while the vertical connections are made of copper nanowires selectively grown inside the nanopores. The lateral wall position can, therefore, be freely adjusted. Waveguides in the $V$ -band (50–75 GHz) and the $W$ -band (75–110 GHz) were manufactured in a 50- $\mu \text{m}$ -thick membrane. For the measurement purpose, wideband transitions from a grounded coplanar waveguide to the waveguide were designed. The measured performance validates the propagation of guided waves with an attenuation constant of about 0.5–0.8 dB/mm in the operating bands, opening the way for the design of functionalized millimeter-wave alumina interposers.
- Published
- 2019
- Full Text
- View/download PDF