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Low-frequency (LF) noise measurements are compared for Schottky-gate AlGaN/GaN heterostructure planar and fin field-effect transistors (FinFETs) as functions of gate voltage and measuring temperature. The noise of each device type is consistent with a carrier number fluctuation model. Similar effective defect-energy Eo distributions are derived for each of the two device architectures from measurements of excess drain-voltage noise-power spectral density vs temperature from 80 to 380 K. Defect- and/or impurity-related peaks are observed in the inferred energy distributions for Eo < 0.2 eV, Eo ≈ 0.45 eV, and Eo > 0.6 eV. Significant contributions to the LF noise are inferred for nitrogen vacancies and ON and FeGa impurity complexes. Ga dangling bonds at fin interfaces with gate metal are likely candidates for enhanced noise observed in FinFETs, relative to planar devices. Reducing the concentrations of these defects and impurity complexes should reduce the LF noise and enhance the performance, reliability, and radiation tolerance of GaN-based high electron mobility transistors. [ABSTRACT FROM AUTHOR]