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Your search keyword '"Hosoda, Hirokazu"' showing total 7 results
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7 results on '"Hosoda, Hirokazu"'

1. Update of >300W high power LPP-EUV source challenge IV for semiconductor HVM

Author

Mizoguchi, Hakaru, primary, Tomuro, Hiroaki, additional, Nishimura, Yuichi, additional, Hosoda, Hirokazu, additional, Nakarai, Hiroaki, additional, Abe, Tamotsu, additional, Tanaka, Hiroshi, additional, Watanabe, Yukio, additional, Shiraishi, Yutaka, additional, Yanagiga, Tatsuya, additional, Soumagne, Georg, additional, Iwamoto, Fumio, additional, Nagai, Shinji, additional, Ueno, Yoshifumi, additional, Suganuma, Takashi, additional, Niimi, Gouta, additional, Yabu, Takayuki, additional, Yamada, Tsuyoshi, additional, and Saitou, Takashi, additional

Published
2021
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3. Update of >300W high power LPP-EUV source challenge for semiconductor HVM

Author

Mizoguchi, Hakaru, primary, Nakarai, Hiroaki, additional, Abe, Tamotsu, additional, Tanaka, Hiroshi, additional, Watanabe, Yukio, additional, Hori, Tsukasa, additional, Shiraishi, Yutaka, additional, Ueno, Yoshifumi, additional, Yanagida, Tatsuya, additional, Soumagne, Georg, additional, Yamada, Tsuyoshi, additional, Saitou, Takashi, additional, Hosoda, Hirokazu, additional, Tomuro, Hiroaki, additional, Nagai, Shinji, additional, Niimi, Gouta, additional, and Suganuma, Takashi, additional

Published
2020
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4. Update of >300W high power LPP-EUV source challenge IV for semiconductor HVM

Author

Ronse, Kurt G., Naulleau, Patrick P., Gargini, Paolo A., Itani, Toshiro, Hendrickx, Eric, Mizoguchi, Hakaru, Tomuro, Hiroaki, Nishimura, Yuichi, Hosoda, Hirokazu, Nakarai, Hiroaki, Abe, Tamotsu, Tanaka, Hiroshi, Watanabe, Yukio, Shiraishi, Yutaka, Yanagiga, Tatsuya, Soumagne, Georg, Iwamoto, Fumio, Nagai, Shinji, Ueno, Yoshifumi, Suganuma, Takashi, Niimi, Gouta, Yabu, Takayuki, Yamada, Tsuyoshi, and Saitou, Takashi

Published
2021
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