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1. IGZO Integration Scheme For Enabling IGZO nFETs

Author

Kljucar, L., primary, Mitard, J., additional, Rassoul, N., additional, Dekkers, H., additional, Steudel, S., additional, Borniquel, J.I.delAgua, additional, Wachter, B.De, additional, Teugels, L., additional, Tsvetanova, D., additional, Devriendt, K., additional, Grisin, I., additional, Boccardi, G., additional, Hody, H., additional, Nag, M., additional, Piazza, L.Di, additional, Wilson, C.J., additional, Kar, G.S., additional, Tokei, Z., additional, Ramalingam, J., additional, Cao, Y., additional, and Diehl, D.L., additional

Published
2019
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