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Active inkjet materials are invoked in the fabrication of optoelectronic devices. These types of multilayer assemblies contain a variety of commercially available ink formulations. It is envisioned that a dielectric SU-8 material can be used in a FET-like structure to form an interlayer between conductive silver and semi-conductive MWCNT-doped PEDOT:PSS ink layers. These printed structures may be fabricated onto a polyimide based flexible substrate, for instance. These structures are a starting point for offering valuable information on layer-on-layer printing interactions and interface problematics within a complete inkjet device fabrication.

This paper reports the infrared spectral responses of 17 and 35 μm uncooled bolometers fabricated at INO. They are measured by making use of an external readout circuit along with a monochromator. As expected, the spectral absorption strongly depends on the bolometer stack as well as the pixel layout. By proper selection of design parameters, the spectral response can be made flat from 3 to 14 μm without significant deterioration of the detector figure of merit.

This paper reviews recent developments in customized packaged bolometers at INO with an emphasis on their applications. The evolution of INOs bolometer packages is also presented. Fully packaged focal plane arrays of broadband microbolometers with expanded absorbing range are shown, for applications in spectroscopic and THz imaging. This paper also reports on the development of customized packaged bolometer focal plane arrays (FPAs) for space applications such as a multispectral imaging radiometer for fire diagnosis, a far infrared radiometer for in-situ measurements of ice clouds and a net flux radiometer for Mars exploration.

Over the past decade, INO has leveraged its expertise in the development of uncooled microbolometer detectors for infrared imaging to produce terahertz (THz) imaging systems. By modifying its microbolometer-based focal plane arrays to enhance absorption in the THz bands and by developing custom THz imaging lenses, INO has developed a leading-edge THz imaging system, the IRXCAM-THz-384 camera, capable of exploring novel applications in the emerging field of terahertz imaging and sensing. Using appropriate THz sources, results show that the IRXCAM-THz-384 camera is able to image a variety of concealed objects of interest for applications such as non-destructive testing and weapons detections. By using a longer wavelength (94 GHz) source, it is also capable of sensing the signatures of various objects hidden behind a drywall panel. This article, written as a review of THz research at INO over the past decade, describes the technical components that form the IRXCAM-THz-384 camera and the experimental setup used for active THz imaging. Image results for concealed weapons detection experiments, an exploration of wavelength choice on image quality, and the detection of hidden objects behind drywall are also presented.

Many packaging approaches for integrated optics cannot meet the industry demand. We propose a post-assembly correction concept, using a liquid crystal element compatible with small form-factor pluggable modules, which may significantly reduce costs.

Microfabrication for integrated MEMS is the art of combining micro electronic circuits with micro optics, mechanics, fluidics, sensing and other technologies. To meet the diversified requirements for MEMS (Micro Electro Mechanical Systems) and MOEMS (Micro Opto Electro Mechanical Systems), a broad spectrum of materials and fabrication processes must be available. INO is the only entity offering MEMS foundry-type services in Canada. These services include design, prototyping, fabrication of mini-series, packaging and testing of various MEMS.

This paper reports on the development of a fully packaged focal plane array of broadband microbolometers. The detector makes use of a gold black thin film to expand its absorption range from 3 to 14 μm. A low temperature packaging process was developed to minimize sintering of the gold black absorber during vacuum sealing of the bolometer array package. The gold black absorber was also laser trimmed to prevent lateral diffusion of heat and promote a better MTF. The resulting FPAs show a NETD lower than 25 mK at a frame rate of 50 Hz

This paper reports the NETD values of various uncooled bolometers fabricated at INO. They are measured using an external readout circuit that emulates the readout scheme of a commercial ROIC. The measured NETD values range between 6 and 75 mK, depending on the pixel pitch and response time. Pixel pitches of 12, 17 and 35 μm are considered. The figure of merit of the characterized detectors is below 350 mK*ms.

A compact camera core designed for application integration is introduce. The camera core shows high sensitivity over a wide spectral range.