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We measured the mechanical loss of a dielectric multilayer reflective coating (ion-beam-sputtered SiO2 and Ta2O5) with and without TiO2 on sapphire disks between 6 and 77 K. The measured loss angle exhibited a temperature dependence, and the local maximum was found at approximately 20 K. This maximum was 7.0*10^(-4) (with TiO2) and 7.7*10^(-4) (without TiO2), although the previous measurement for the coating on sapphire disks showed almost no temperature dependence (Phys. Rev. D 74 022002 (2006)). We evaluated the coating thermal noise in KAGRA and discussed future investigation strategies.

Low internal friction coatings are key components of advanced technologies such as optical atomic clocks and high-finesse optical cavity and often lie at the forefront of the most advanced experiments in Physics. Notably, increasing the sensitivity of gravitational-wave detectors depends in a very large part on developing new coatings, which entails developing more suitable methods and models to investigate their loss angle. In fact, the most sensitive region of the detection band in such detectors is limited by the coating thermal noise, which is related to the loss angle of the coating. Until now, models which describe only ideal physical properties have been adopted, wondering about the use of one or more loss angles to describe the mechanical properties of coatings. Here we show the presence of a systematic error ascribed to inhomogeneity of the sample at its edges in measuring the coating loss angle. We present a model for disk-shaped resonators, largely used in loss angle measurements, and we compare the theory with measurements showing how this systematic error impacts on the accuracy with which the loss model parameters are known.

Amorphous mixed titania-tantala coatings are key components of Bragg reflectors in the gravitational wave detectors (GWDs). Attaining the lowest possible values of optical absorption and mechanical losses in the coatings is of paramount importance for GWDs, and this requires a complex optimization of the coating deposition and post-deposition annealing. We present here a systematic investigation of the optical properties and internal friction of amorphous mixed titania-tantala coatings grown by ion beam sputtering. We consider coatings with six different cation mixing ratios and we study them both in the as-deposited and annealed state. By exploiting spectroscopic ellipsometry data and modelling, along with ancillary techniques, we retrieved the dielectric function of the coatings in a wide spectral range. When varying the mixing ratio and performing the annealing we find monotonic trends for most of the aforementioned properties. Remakably, the post-annealing Urbach energy displays a definite minimum for a mixing ratio around 20%, very close to the composition of the coatings showing the lowest optical absorption for GWDs applications. We suggest that the observed minimum in the Urbach energy depends not only on the mixing ratio, but also on the annealing parameters. On the other hand, the minimum coating loss angle was found to be weakly dependent on the considered measurement frequency and to lie within a rather broad range of Ti content, suggesting that the search for an absolute minimum following post-deposition annealing should be rather sought in the study of the best annealing parameters for each specific cation ratio considered. This work constitutes a reference for the optical properties of the amorphous mixed titania-tantala coatings, and highlights the relevance of the Urbach energy in the optimization process of materials for high-performing Bragg reflectors., Comment: Pre-submission draft

Coating thermal noise is a fundamental limit for precision experiments based on optical and quantum transducers. In this review, after a brief overview of the techniques for coating thermal noise measurements, we present the latest world-wide research activity on low-noise coatings, with a focus on the results obtained at the Laboratoire des Mat\'{e}riaux Avanc\'{e}s. We report new updated values for the Ta$_2$O$_5$, Ta$_2$O$_5$-TiO$_2$ and SiO$_2$ coatings of the Advanced LIGO, Advanced Virgo and KAGRA detectors, and new results from sputtered Nb$_2$O$_5$, TiO$_2$-Nb$_2$O$_5$, Ta$_2$O$_5$-ZrO$_2$, MgF$_2$, AlF$_3$ and silicon nitride coatings. Amorphous silicon, crystalline coatings, high-temperature deposition, multi-material coatings and composite layers are also briefly discussed, together with the latest developments of structural analyses and models., Comment: arXiv admin note: text overlap with arXiv:1909.03737

High reflective coatings are used in many physics experiments. Despite the high quality of the opticalcoating, the performances of the mirrors is altered by the scattered light induced by micrometers sizedefects in the coating layers. The topic of this paper is the study of the point-like scatterers present in thespecific coating of the mirrors used in state of the art, high sensitivity optical experiments. We studied thebehavior of the materials according to different thicknesses, and how the defects change after annealing.To our knowledge, this is a first insight into the formation of such defects for different materials andthickness and how this is reduced when samples are annealed., Comment: 9 pages, 4 figures, submitted to Applied Optics - OSA

We report on the results of an extensive campaign of optical and mechanical characterization of the ion-beam sputtered oxide layers (Ta$_2$O$_5$, TiO$_2$, Ta$_2$O$_5$-TiO$_2$, SiO$_2$) within the high-reflection coatings of the Advanced LIGO, Advanced Virgo and KAGRA gravitational-wave detectors: refractive index, thickness, optical absorption, composition, density, internal friction and elastic constants have been measured; the impact of deposition rate and post-deposition annealing on coating internal friction has been assessed. For Ta$_2$O$_5$ and SiO$_2$ layers, coating internal friction increases with the deposition rate, whereas the annealing treatment either erases or largely reduces the gap between samples with different deposition history. For Ta$_2$O$_5$-TiO$_2$ layers, the reduction of internal friction due to TiO$_2$ doping becomes effective only if coupled with annealing. All measured samples showed a weak dependence of internal friction on frequency ($\phi_c(f) = af^{b}$, with $-0.208 < b < 0.140$ depending on the coating material considered). SiO$_2$ films showed a mode-dependent loss branching, likely due to spurious losses at the coated edge of the samples. The reference loss values of the Advanced LIGO and Advanced Virgo input (ITM) and end (ETM) mirror HR coatings have been updated by using our estimated value of Young's modulus of Ta$_2$O$_5$-TiO$_2$ layers (120 GPa) and are about 10\% higher than previous estimations.

We have investigated by spectroscopic ellipsometry (SE, 190-1700 nm) the optical properties of uniform, amorphous thin films of Ta2O5 and Nb2O5 as deposited and after annealing, and after so-called "doping" with Ti atoms which leads to mixed oxides. Ta2O5 and Ti:Ta2O5 are currently used as high-index components in Bragg reflectors for Gravitational Wave Detectors. Parallel to the optical investigation, we measured the mechanical energy dissipation of the same coatings, through the so-called "loss angle" phi = Q^-1, which quantifies the energy loss in materials. By applying the well-known Cody-Lorentz model in the analysis of SE data we have been able to derive accurate information on the fundamental absorption edge through important parameters related to the electronic density of states, such as the optical gap (E_g) and the energy width of the exponential Urbach tail (the Urbach energy E_U). We have found that E_U is neatly reduced by suitable annealing as is also perceptible from direct inspection of SE data. Ti-doping also points to a minor decrease of E_U. The reduction of E_U parallels a lowering of the mechanical losses quantified by the loss angle phi. The correlation highlights that both the electronic states responsible of Urbach tail and the internal friction are sensitive to a self-correlation of defects on a medium-range scale, which is promoted by annealing and in our case, to a lesser extent, by doping. These observations may contribute to a better understanding of the relationship between structural and mechanical properties in amorphous oxides.

We report on the optical, mechanical and structural characterization of the sputtered coating materials of Advanced LIGO, Advanced Virgo and KAGRA gravitational-waves detectors. We present the latest results of our research program aiming at decreasing coating thermal noise through doping, optimization of deposition parameters and post-deposition annealing. Finally, we propose sputtered Si3N4 as a candidate material for the mirrors of future detectors.

Energy dissipation in amorphous coatings severely affects high-precision optical and quantum transducers. In order to isolate the source of coating loss, we performed an extensive study of Raman scattering and mechanical loss of a thermally-treated sputtered silica coating. Our results show that loss is correlated with the population of three-membered rings of Si-O$_4$ tetrahedral units, and support the evidence that thermal treatment reduces the density of metastable states separated by a characteristic energy of about 0.5 eV, in favour of an increase of the states separated by smaller activation energies. Finally, we conclude that three-fold rings are involved in the relaxation mechanisms only if they belong to more complex chain-like structures of 10 to 100 tetrahedra., Comment: 5 pages, 3 figures

A new method of probing mechanical losses and comparing the corresponding deposition processes of metallic and dielectric coatings in 1-100 MHz frequency range and cryogenic temperatures is presented. The method is based on the use of extremely high-quality quartz acoustic cavities whose internal losses are orders of magnitude lower than any available coatings nowadays. The approach is demonstrated for Chromium, Chromium/Gold and a multilayer tantala/silica coatings. The ${\rm Ta}_2{\rm O}_5/{\rm Si}{\rm O}_2$ coating has been found to exhibit a loss angle lower than $1.6\times10^{-5}$ near 30 {\rm MHz} at 4 {\rm K}. The results are compared to the previous measurements.

We present the results of mechanical characterizations of many different high-quality optical coatings made of ion-beam-sputtered titania-doped tantala and silica, developed originally for interferometric gravitational-wave detectors. Our data show that in multi-layer stacks (like high-reflection Bragg mirrors, for example) the measured coating dissipation is systematically higher than the expectation and is correlated with the stress condition in the sample. This has a particular relevance for the noise budget of current advanced gravitational-wave interferometers, and, more generally, for any experiment involving thermal-noise limited optical cavities., Comment: 31 pages, 14 figures