1. Ammonia Decomposition Back in Style.
- Author
-
Chidgopkar, Vikrant, Taylor, Anthony, Kilgarriff, Ian, Seeley, Andy, Hussain, Shahid, and Czerniak, Mike
- Subjects
- *
CHEMICAL decomposition , *GALLIUM nitride , *ORGANOMETALLIC compounds , *SEMICONDUCTORS - Abstract
Describes the catalytic decomposition of ammonia from gallium nitride in metalorganic chemical vapor deposition exhausts in the U.S. Removal of metal-organic species that would poison the catalyst bed; Reduction of maintenance costs for catalytic decomposition systems; Use of metalorganic vapor phase epitaxy for depositing layers of compound semiconductors.
- Published
- 2003