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With advancements in system integration and high speed data converters, high performance phased array antenna (PAA) systems become practical in very small form factors. This expands their use cases in a variety of communication and RF sensing applications. This article discusses the performance characterization challenges associated with highly integrated RF front-end and digital baseband devices, including the RF path in digital beamforming or software-defined radio devices, RF transceiver ICs and high speed data converters. The development of a new digital and RF cross-domain stimulus/response method is introduced using a vector network analyzer (VNA) and measurement examples are provided for a digital and RF mixed signal device. [ABSTRACT FROM AUTHOR]