1. mmWave Reflectionless Filters Using Advanced Thin Film Fabrication.
- Author
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Morgan, Matthew A., Boyd, Tod A., Seng Loo, and Miho Hunter
- Subjects
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BANDPASS filters , *HIGHPASS electric filters , *ELECTRIC circuits , *ACOUSTIC surface waves , *CRYSTAL filters , *QUARTZ - Abstract
This article explores the development of mmWave reflectionless filters using advanced thin film fabrication techniques. The filters have a cutoff frequency of around 60 GHz and can operate up to 120 GHz. The fabrication process involves lithographic resolution down to 2 μm and the use of integrated circuit elements like metal-insulator-metal capacitors, bridges, and thin film resistors. The filters have shown high yield and are suitable for mass production and commercialization. The article also provides a historical overview of absorptive filters and highlights the advantages of reflectionless filters. The document goes into detail about the thin film fabrication process used to create these filters on a quartz substrate, including the deposition of tantalum nitride and gold layers, etching metal layers, patterning resistors, and depositing and etching a silicon nitride dielectric layer. The circuits are then thinned and diced. The document also discusses the measurements and testing conducted on the fabricated filters, which achieved high frequencies in small form factors, making them among the smallest ever reported. The article further delves into the development of reflectionless filters with arbitrary transfer functions, presenting various studies and designs that showcase their advantages and applications. The authors specifically focus on the fabrication process and the use of advanced thin film technology to achieve high performance and compactness. The article concludes by comparing their work to other approaches in terms of size and frequency, demonstrating the effectiveness of their designs. [Extracted from the article]
- Published
- 2024