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Your search keyword '"Tsuji O"' showing total 2 results
Start Over Author "Tsuji O" Publication Type Reports
2 results on '"Tsuji O"'

1. Conformal oxide coating of Carbon Nanotubes

Author

Kawasaki, S., Catalan, G., Fan, H., Saad, M. M., Gregg, J. M., Correa-Duarte, M. A., Rybczynski, J., Morrison, F. D., Tatsuta, T., Tsuji, O., and Scott, J. F.

Subjects
Condensed Matter - Materials Science
Abstract

The International Roadmap for Ferroelectric Memories requires three-dimensional integration of high-dielectric materials onto metal interconnects or bottom electrodes by 2010. We report the first integration of high-dielectric oxide films onto carbon nanotube electrodes with an aim of ultra-high integration density of FeRAMs (Tb/in2)., Comment: 4 pages, 3 figures

Published
2007
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2. Parameters and controlling of plasma chemistry

Author

Tsuji, O

Subjects
Plasma Physics
Abstract

The parameters involved in plasma polymerization reactions are examined and the use of these parameters in the control of plasma reactions is dicussed. The variables associated with the reaction chamber, electrical discharge form, frequency and electrical source for the development of plasma, and monitoring techniques are addressed.

Published
1981

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