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1. Power Mems and Microengines

Author

Epstein, A. H., primary, Senturia, S. D., primary, Anathasuresh, G., primary, Ayon, A., primary, Breuer, K., primary, Chen, K-S., primary, Ehrich, F. E., primary, Gauba, G., primary, Ghodssi, R., primary, and Groshenry, C., primary

Published
1997
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