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Experiments show that shallow nitrogen implantations (<10keV) result in a negatively charged nitrogen-vacancy center (NV-) yield of 0.01-0.1%. The most succesful technique for introducing NV- centers in the carbon matrix is ion implantation followed by annealing at 1100K. We investigated the influence of channeling effects during shallow implantation and statistical diffusion using molecular dynamics (MD) and Monte Carlo (MC) approaches. Energy barriers for the diffusion process were calculated using the density functional theory (DFT). Our simulations show a significant difference in the NV yield compared to the experiment. Statistically, 25% of the implanted nitrogens form a NV center after annealing., Comment: 5 pages, 6 figures

We present a solid state magnetic field imaging technique using a two dimensional array of spins in diamond. The magnetic sensing spin array is made of nitrogen-vacancy (NV) centers created at shallow depths. Their optical response is used for measuring external magnetic fields in close proximity. Optically detected magnetic resonance (ODMR) is readout from a 60x60 $\mu$m field of view in a multiplexed manner using a CCD camera. We experimentally demonstrate full two-dimensional vector imaging of the magnetic field produced by a pair of current carrying micro-wires. The presented widefield NV magnetometer offers in addition to its high magnetic sensitivity of 20 nT/$\sqrt{Hz}$ and vector reconstruction, an unprecedented spatio-temporal resolution and functionality at room temperature.