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We report on the development of multi-absorber transition edge sensors (TESs), referred to as hydras. A hydra consists of multiple x-ray absorbers each with a different thermal conductance to a TES. Position information is encoded in the pulse shape. With some trade-off in performance, hydras enable very large format arrays without the prohibitive increase in bias and read-out components associated with arrays of individual TESs. Hydras are under development for the next generation of space telescope such as Lynx. Lynx is a NASA concept under study that will combine a < 1 arcsecond angular resolution optic with 100,000-pixel microcalorimeter array with energy resolution of deltaE_FWHM ~ 3 eV in the soft x-ray energy range. We present first results from hydras with 25-pixels for Lynx. Designs with absorbers on a 25 micron and 50 micron pitch are studied. Arrays incorporate, for the first time, microstrip buried wiring layers of suitable pitch and density required to readout a full-scale Lynx array. The resolution from the coadded energy histogram including all 25-pixels was deltaE_FWHM = 1.66+/-0.02 eV and 3.34+/-0.06 eV at an energy of 1.5 keV for the 25 micron and 50 micron absorber designs respectively. Position discrimination is demonstrated from parameterization of the rise-time., Comment: 7 pages, 5 figures. Low Temperature Detectors 18 Conference, Milan Italy

The experimental investigation of a broadband far-infrared meta-material absorber is described. The observed absorptance is $>\,0.95$ from ${\rm 1-20\,THz}$ (${\rm 300-15\,\mu m}$) over a temperature range spanning ${\rm 5-300\,K}$. The meta-material, realized from an array of tapers ${\rm \approx 100\,\mu m}$ in length, is largely insensitive to the detailed geometry of these elements and is cryogenically compatible with silicon-based micro-machined technologies. The electromagnetic response is in general agreement with a physically motivated transmission line model., Comment: 6 pages, 2 figures, published -- Review of Scientific Instruments 87, 054701 (2016)

The SPTpol camera is a two-color, polarization-sensitive bolometer receiver, and was installed on the 10 meter South Pole Telescope in January 2012. SPTpol is designed to study the faint polarization signals in the Cosmic Microwave Background, with two primary scientific goals. One is to constrain the tensor-to-scalar ratio of perturbations in the primordial plasma, and thus constrain the space of permissible inflationary models. The other is to measure the weak lensing effect of large-scale structure on CMB polarization, which can be used to constrain the sum of neutrino masses as well as other growth-related parameters. The SPTpol focal plane consists of seven 84-element monolithic arrays of 150 GHz pixels (588 total) and 180 individual 90 GHz single-pixel modules. In this paper we present the design and characterization of the 90 GHz modules.

We present the software system used to control and operate the South Pole Telescope. The South Pole Telescope is a 10-meter millimeter-wavelength telescope designed to measure anisotropies in the cosmic microwave background (CMB) at arcminute angular resolution. In the austral summer of 2011/12, the SPT was equipped with a new polarization-sensitive camera, which consists of 1536 transition-edge sensor bolometers. The bolometers are read out using 36 independent digital frequency multiplexing (\dfmux) readout boards, each with its own embedded processors. These autonomous boards control and read out data from the focal plane with on-board software and firmware. An overall control software system running on a separate control computer controls the \dfmux boards, the cryostat and all other aspects of telescope operation. This control software collects and monitors data in real-time, and stores the data to disk for transfer to the United States for analysis.

SPTpol is a dual-frequency polarization-sensitive camera that was deployed on the 10-meter South Pole Telescope in January 2012. SPTpol will measure the polarization anisotropy of the cosmic microwave background (CMB) on angular scales spanning an arcminute to several degrees. The polarization sensitivity of SPTpol will enable a detection of the CMB "B-mode" polarization from the detection of the gravitational lensing of the CMB by large scale structure, and a detection or improved upper limit on a primordial signal due to inflationary gravity waves. The two measurements can be used to constrain the sum of the neutrino masses and the energy scale of inflation. These science goals can be achieved through the polarization sensitivity of the SPTpol camera and careful control of systematics. The SPTpol camera consists of 768 pixels, each containing two transition-edge sensor (TES) bolometers coupled to orthogonal polarizations, and a total of 1536 bolometers. The pixels are sensitive to light in one of two frequency bands centered at 90 and 150 GHz, with 180 pixels at 90 GHz and 588 pixels at 150 GHz. The SPTpol design has several features designed to control polarization systematics, including: single-moded feedhorns with low cross-polarization, bolometer pairs well-matched to difference atmospheric signals, an improved ground shield design based on far-sidelobe measurements of the SPT, and a small beam to reduce temperature to polarization leakage. We present an overview of the SPTpol instrument design, project status, and science projections., Comment: 18 pages, 6 figures

The SPTpol camera is a dichroic polarimetric receiver at 90 and 150 GHz. Deployed in January 2012 on the South Pole Telescope (SPT), SPTpol is looking for faint polarization signals in the Cosmic Microwave Background (CMB). The camera consists of 180 individual Transition Edge Sensor (TES) polarimeters at 90 GHz and seven 84-polarimeter camera modules (a total of 588 polarimeters) at 150 GHz. We present the design, dark characterization, and in-lab optical properties of the 150 GHz camera modules. The modules consist of photolithographed arrays of TES polarimeters coupled to silicon platelet arrays of corrugated feedhorns, both of which are fabricated at NIST-Boulder. In addition to mounting hardware and RF shielding, each module also contains a set of passive readout electronics for digital frequency-domain multiplexing. A single module, therefore, is fully functional as a miniature focal plane and can be tested independently. Across the modules tested before deployment, the detectors average a critical temperature of 478 mK, normal resistance R_N of 1.2 Ohm, unloaded saturation power of 22.5 pW, (detector-only) optical efficiency of ~ 90%, and have electrothermal time constants < 1 ms in transition., Comment: 15 pages, 11 figures

In January 2012, the 10m South Pole Telescope (SPT) was equipped with a polarization-sensitive camera, SPTpol, in order to measure the polarization anisotropy of the cosmic microwave background (CMB). Measurements of the polarization of the CMB at small angular scales (~several arcminutes) can detect the gravitational lensing of the CMB by large scale structure and constrain the sum of the neutrino masses. At large angular scales (~few degrees) CMB measurements can constrain the energy scale of Inflation. SPTpol is a two-color mm-wave camera that consists of 180 polarimeters at 90 GHz and 588 polarimeters at 150 GHz, with each polarimeter consisting of a dual transition edge sensor (TES) bolometers. The full complement of 150 GHz detectors consists of 7 arrays of 84 ortho-mode transducers (OMTs) that are stripline coupled to two TES detectors per OMT, developed by the TRUCE collaboration and fabricated at NIST. Each 90 GHz pixel consists of two antenna-coupled absorbers coupled to two TES detectors, developed with Argonne National Labs. The 1536 total detectors are read out with digital frequency-domain multiplexing (DfMUX). The SPTpol deployment represents the first on-sky tests of both of these detector technologies, and is one of the first deployed instruments using DfMUX readout technology. We present the details of the design, commissioning, deployment, on-sky optical characterization and detector performance of the complete SPTpol focal plane., Comment: 15 pages, 6 figures. Conference: SPIE Astronomical Telescopes and Instrumentation 2012

The thermal transport in partially trenched silicon nitride membranes has been studied in the temperature range from 0.3 to 0.6 K, with the transition edge sensor (TES), the sole source of membrane heating. The test configuration consisted of Mo/Au TESs lithographically defined on silicon nitride membranes 1 micron thick and 6 mm^2 in size. Trenches with variable depth were incorporated between the TES and the silicon frame in order to manage the thermal transport. It was shown that sharp features in the membrane surface, such as trenches, significantly impede the modes of phonon transport. A nonlinear dependence of thermal resistance on trench depth was observed. Partial perforation of silicon nitride membranes to control thermal transport could be useful in fabricating mechanically robust detector devices., Comment: 3 pages; 3 figs

ATHENA is a European led x-ray observatory due for launch in the early 2030s. The X-ray Integral Field Unit (X-IFU) instrument on ATHENA will have an array of 3168 TES microcalorimeters, 2.5 eV resolution (at 7 keV), 5 arc second angular resolution and a 5 arc minute field of view. As one example, will allow unprecedented views of composition and dynamics of galaxy clusters.

Lynx is an x-ray telescope, one of four large satellite mission concepts currently being studied by NASA to be a flagship mission. One of Lynx’s three instruments is an imaging spectrometer called the Lynx x-ray microcalorimeter (LXM), an x-ray microcalorimeter behind an x-ray optic with an angular resolution of 0.5 arc sec and ∼2 sq. m of area at 1 keV. The LXM will provide unparalleled diagnostics of distant extended structures and, in particular, will allow the detailed study of the role of cosmic feedback in the evolution of the Universe. We discuss the baseline design of LXM and some parallel approaches for some of the key technologies. The baseline sensor technology uses transition-edge sensors, but we also consider an alternative approach using metallic magnetic calorimeters. We discuss the requirements for the instrument, the pixel layout, and the baseline readout design, which uses microwave superconducting quantum interference devices and high-electron mobility transistor amplifiers and the cryogenic cooling requirements and strategy for meeting these requirements. For each of these technologies, we discuss the current technology readiness level and our strategy for advancing them to be ready for flight. We also describe the current system design, including the block diagram, and our estimate for the mass, power, and data rate of the instrument.

In many superconducting transition-edge sensor (TES) microcalorimeters, the measured electrical noise exceeds theoretical estimates based on a thermal model of a single body thermally connected to a heat bath. Here, we report on noise and complex impedance measurements of a range of designs of TESs made with a Mo/Au bilayer. We have fitted the measured data using a two-body model, where the x-ray absorber and the TES are connected by an internal thermal conductance Gae. We find that the so-called excess noise measured in these devices is consistent with the noise generated from the internal thermal fluctuations between the x-ray absorber and the TES. Our fitted parameters are consistent with the origin of Gae being from the finite thermal conductance of the TES itself. These results suggest that even in these relatively low resistance Mo/Au TESs, the internal thermal conductance of the TES may add significant additional noise and could account for all the measured excess noise. Furthermore, we find that around regions of the superconducting transition with rapidly changing derivative of resistance with respect to temperature, an additional noise mechanism may dominate. These observations may lead to a greater understanding of TES devices and allow the design of TES microcalorimeters with improved performance.

We are developing arrays of position-sensitive microcalorimeters for future x-ray astronomy applications. These position-sensitive devices commonly referred to as hydras consist of multiple x-ray absorbers, each with a different thermal coupling to a single-transition-edge sensor microcalorimeter. Their development is motivated by a desire to achieve very large pixel arrays with some modest compromise in performance. We report on the design, optimization, and first results from devices with small pitch pixels (<75 μm) being developed for a high-angular and energy resolution imaging spectrometer for Lynx. The Lynx x-ray space telescope is a flagship mission concept under study for the National Academy of Science 2020 decadal survey. Broadband full-width-half-maximum (FWHM) resolution measurements on a 9-pixel hydra have demonstrated ΔE(FWHM) = 2.23 ± 0.14 eV at Al-Kα, ΔE(FWHM) = 2.44 ± 0.29 eV at Mn-Kα, and ΔE(FWHM) = 3.39 ± 0.23 eV at Cu-Kα. Position discrimination is demonstrated to energies below <1 keV and the device performance is well-described by a finite-element model. Results from a prototype 20-pixel hydra with absorbers on a 50-μm pitch have shown ΔE(FWHM) = 3.38 ± 0.20 eV at Cr-Kα1. We are now optimizing designs specifically for Lynx and extending the number of absorbers up to 25/hydra. Numerical simulation suggests optimized designs could achieve ∼3 eV while being compatible with the bandwidth requirements of the state-of-the art multiplexed readout schemes, thus making a 100,000 pixel microcalorimeter instrument a realistic goal.

Microcalorimeters have the potential to provide line shapes well-described by a single Gaussian broadening term of few-eV width. This attribute makes the detectors especially well suited for x-ray astrophysics observations; however, low-level non-Gaussian broadening terms are expected and must be characterized. These terms depend on the composition of the x-ray absorber, the detailed x-ray absorption physics, the device thermalization processes, and the incident x-ray energy. Here we present the first measurements targeted at understanding the extended line-spread function (LSF) of x-ray microcalorimeter pixels under development for the X-ray Integral Field Unit (XIFU) on the Athena X-ray Observatory. These pixels are comprised of Mo/Au transition-edge sensors (TESs) with overhanging electroplated Au/Bi absorbers. We measured the line shapes using monochromatic x-ray sources with < 1 eV width at several x-ray energies (0.85, 0.93, 1.25, 1.5, 5.4, and 8.0 keV) across the instrument bandpass (0.3-12 keV) and modeled the line profiles. These results are compared to the extended LSF of the Hitomi microcalorimeter pixels that used HgTe absorbers.

The performance of transition-edge sensors (TES) and their SQUID multiplexed readouts is very sensitive to ambient magnetic field and its fluctuations. In order to run ground experiments on thousands of X-ray TES microcalorimeters with a small uniform ambient magnetic field (< 1 μT, with a uniformity < 0.1 μT), we need a very low ambient field to be trapped into the superconducting magnetic shields. We have designed a sub-Kelvin test platform to reach these specifications. For this purpose, we modeled a new design for the shielding consisting of a series of different mu-metal and superconducting shields, including a niobium shield at 50 mK, a cryoperm (A4K) shield at 3 K, and a mu-metal shield at 300 K. A magnetic field coil is used to vary the local perpendicular magnetic field over the TES array. To optimize this field, we have studied a number of different field-coil designs and the impact of the different shield geometries, in order to reach the required field uniformity.

Lynx is a proposed NASA X-Ray telescope flight mission aimed at achieving state-of-the-art angular and energy resolution with a 100 kilopixel array to probe the hot energetic young universe in unprecedented detail. To achieve these goals, our team plans on leveraging our current work in development of the focal plane for the Athena X-Ray Integral Field Unit (X-IFU) while advancing the state-of-the-art in transition edge sensor (TES) X-ray detector technology. The TES is an optimal technology for achieving both high energy and fine angular resolution at the same time because pixel features can be made extremely small and the absorber which dominates the heat capacity can be tuned to meet resolution requirements. Specifically, the proposed mission concept calls for a hybrid detector of three different arrays fabricated in the same planar process in one focal plane and optimized for different science goals. The main arrays consist of 5x5 hydras, 25 pixels of 4 micron thick Au absorbers each with a different thermal link to one common TES. The outer array has absorbers on a 50-micron pitch for most of the 5 arc-minute field-of-view, and the inner array has 25-micron absorbers for the central 1 arc-minute region. A high resolution array consisting of single pixel 1 micron thick Au absorbers on 50-micron pitch will lie off to the side. Reading out an array of this magnitude will likely require improvements in indium bump bonding to superconducting flexible wiring. Fabrication of absorbers of two different sizes requires electroplating through a photoresist mold by careful tuning of the current density to achieve uniform flat absorbers on a fine pitch scale, followed by ion milling to yield narrow streets separating the pixels while preserving high quantum efficiency. We report on progress made at fabricating the hybrid array with different absorber sizes and thicknesses. Further, we also report on ongoing work to adequately heat sink the pixels with backside wire bonding and copper coating. We also report on work to improve detector pixel yield and top side indium bump bonding to flexible wiring.

Future astronomy missions using x-ray transition-edge sensor (TES) microcalorimeters, such as X-IFU on Athena, will require large arrays of 1000s of pixels fabricated on a single wafer. To wire out so many pixels the current array designs have pixels with different rotational orientations. Fabrication is done in multiple layers and so, dependent on method, there is potential for spatial misalignment between layers. Because of the variation of orientation of pixels, misalignment may not impact each pixel equally. This has the potential to degrade the achievable uniformity of performance across an array. How well aligned do different layers need to be? How does sensitivity to misalignment depend on choice of pixel design?

Lynx, one of the four mission concepts under consideration for the next Astrophysics DecadalReview, will include a microcalorimeter array consisting of more than 100,000 pixels in a compact arrangement with absorber pitch as small as 25 microns. In order to realize the desired array scale, fine-pitch multi-level superconducting wiring with high yield, compatible with rapid expansion of our hydra absorber designs, is essential. We have demonstrated a method of integrating transition edge sensor (TES) microcalorimeters with suitable multilevel buried wiring, fabricated at MIT Lincoln Laboratory using advanced tools dedicated to superconducting circuit fabrication. The TES Mo/Au bilayer is deposited on a high-quality oxide surface created by chemical-mechanical polishing, allowing tight specifications on the TES superconducting transition and link conductivity to be achieved even though the process order has been inverted. The TESs contact the top-level niobium wiring through vias etched through silicon dioxide down to the topmost wiring layer. The article discusses the overall fabrication process, as wellas the behavior of sensors with different via designs, proximity structures, and lateral sizes. An initial iteration of the integrated fabrication process indicates that microcalorimeters fabricated in this way should meet mission specifications using a Mo/Au bilayer with a reasonable critical temperature below 100 mK.

We are developing kilo-pixel arrays of transition-edge sensors (TESs) for the X-ray Integral Field Unit on ESA's (European Space Agency's) Athena observatory. Previous measurements of AC-biased Mo/Au TESs have highlighted a frequency-dependent loss mechanism that results in broader transitions and worse spectral performance compared to the same devices measured under DC (Direct Current) bias. In order to better understand the nature of this loss, we are now studying TES pixels in different geometric configurations. We present measurements on devices of different sizes and with different metal features used for noise mitigation and X-ray absorption. Our results show how the loss mechanism is strongly dependent upon the amount of metal in close proximity to the sensor and can be attributed to induced eddy current coupling to these features. We present a finite element model that successfully reproduces the magnitude and geometry dependence of the losses. Using this model, we present mitigation strategies that should reduce the losses to an acceptable level.

The X-ray integral field unit (X-IFU) for ESA's Athena X-ray observatory will consist of 3840 AC-biased transition edge sensors (TESs), read out using frequency domain multiplexing (FDM). In this paper we describe details of the latest pixels geometries that are being designed for the current baseline array configuration. This includes details on how important TES properties (transition parameters, thermal design of the pixels, absorber composition) are being optimized to meet the target energy resolution, count-rate and quantum efficiency. We also present the latest design optimizations specifically targeted at mitigating AC-bias phenomena in Mo/Au TESs that can degrade performance.

Superconducting transition-edge sensor (TES) microcalorimeters are being developed for a variety of potential astrophysics missions, including Athena. The X-ray integral field unit instrument on this mission requires close-packed pixels on a 0.25 mm pitch, and high quantum efficiency between 0.2 and 12 keV. In this work, we describe a new approach with 50 μm square TESs consisting of a Mo/Au bilayer, deposited on silicon nitride membranes to provide a weak thermal conductance to a ~50 mK heat bath. Larger TESs usually have additional normal metal stripes on top of the bilayer to reduce the noise. However, we have found that excellent spectral performance can be achieved without the need for any normal metal stripes on top of the TES. A spectral performance of 1.58+/-0.12 eV at 5.9 keV has been achieved, the best resolution seen in any of our devices with this pixel size.

We performed small-scale demonstrations at GSFC of high-resolution Xray TES microcalorimeters read out using a microwave SQUID multiplexer. This work is part of our effort to develop detector and readout technologies for future space-based X-ray instruments such as the microcalorimeter spectrometer envisaged for Lynx, a large mission concept under development for the Astro 2020 Decadal Survey. In this paper we describe our experiment, including details of a recently designed, microwave-optimized low-temperature setup that is thermally anchored to the 55mKstage of our laboratory ADR. Using aROACH2 FPGA at room temperature, we read out pixels of a GSFC-built detector array via a NIST-built multiplexer chip with Nb coplanar waveguide resonators coupled to rf-SQUIDs. The resonators are spaced 6 MHz apart (at ∼ 5.9 GHz) and have quality factors of ∼ 15,000. In our initial demonstration, we used flux-ramp modulation frequencies of 125 kHz to read out 5 pixels simultaneously and achieved spectral resolutions of 2.8-3.1 eV FWHM at 5.9 keV. Our subsequent work is ongoing: to-date we have achieved a median spectral resolution of 3.4 eV FWHM at 5.9 keV while reading out 28 pixels simultaneously with flux-ramp frequencies of 160 kHz. We present the measured system-level noise and maximum slew rates and briefly describe our future development work.

In transition-edge sensors (TESs), the addition of normal metal stripes on top of the superconducting bilayer, perpendicular to the current direction, is known to globally alter the sensitivity of the resistance R to changes in temperature T and current I. Here, we describe measurements of the dependence of the TES current on magnetic field B, bath temperature and voltage bias in devices with various numbers of stripes. We show that the normal metal features have a profound effect on the appearance of localized regions of very large (T/R) dR/dT. We associate this with changes in the current distribution and corresponding changes in the oscillatory pattern of I (B). 140 μm TESs with no stripes are found to have a relatively smooth resistive transition and sufficiently low noise that the measured energy resolution is 1.6 eV for X-rays of 1.5 keV. The predicted energy resolution at 6 keV is better than 2 eV, once the heat capacity is optimized for these higher energies..

Multi-pixel transition-edge sensors (TESs), commonly referred to as 'hydras', are a type of position sensitive micro-calorimeter that enables very large format arrays to be designed without commensurate increase in the number of readout channels and associated wiring. In the hydra design, a single TES is coupled to discrete absorbers via varied thermal links. The links act as low pass thermal filters that are tuned to give a different characteristic pulse shape for x-ray photons absorbed in each of the hydra sub pixels. In this contribution we report on the experimental results from hydras consisting of up to 20 pixels per TES. We discuss the design trade-offs between energy resolution, position discrimination and number of pixels and investigate future design optimizations specifically targeted at meeting the readout technology considered for Lynx.

The performance of Transition-Edge Sensors (TES) and their SQUID multiplexed read-outs are very sensitive to the ambient magnetic field from Earth and fluctuations that can arise due to fluctuating magnetic fields outside of the focal plane assembly from the Adiabatic Demagnetization Refrigerator (ADR).Thus, the experimental platform we are building to test the FPA of the X-ray Integral Field Unit (X-IFU) of the Athena mission needs to include a series of shields and a coil in order to meet the following requirement of magnetic field density and uniformity.

We performed a small-scale demonstration at GSFC of high-resolution x-ray TES microcalorimeters read out using a microwave SQUID multiplexer. This work is part of our effort to develop detector and readout technologies for future space based x-ray instruments such as the microcalorimeter spectrometer envisaged for Lynx, a large mission concept under development for the Astro 2020 Decadal Survey. In this paper we describe our experiment, including details of a recently designed, microwave-optimized low-temperature setup that is thermally anchored to the 50 mK stage of our laboratory ADR. Using a ROACH2 FPGA at room temperature, we simultaneously read out 32 pixels of a GSFC-built detector array via a NIST-built multiplexer chip with Nb coplanar waveguide resonators coupled to RF SQUIDs. The resonators are spaced 6 MHz apart (at approx. 5.9 GHz) and have quality factors of approximately 15,000. Using flux-ramp modulation frequencies of 160 kHz we have achieved spectral resolutions of 3 eV FWHM on each pixel at 6 keV. We will present the measured system-level noise and maximum slew rates, and briefly describe the implications for future detector and readout design.

Exploring the effects of size and geometry of normal metal features on the transition shapes and performance of transition-edge sensor microcalorimeters. The spectral resolution of transition-edge sensor (TES) microcalorimeters is very sensitive to the specific dependencies of the resistance R in the superconducting transition on the current I, magnetic field B, and temperature T. In particular, it has been shown that transitions that are very steep in (R,T) space lead to a significant noise term, in excess of conventional expectations. This so-called unexplained noise is known to be reduced by the addition of normal metal stripes across the TES perpendicular to the direction of current flow. These normal metal stripes have been shown to drastically alter the oscillatory patterns seen in measurements of the critical current as a function of magnetic field. However, there are many remaining questions about the exact impact of the stripes on current distributions within the TES, the Fraunhofer pattern and, therefore, the shape of the R(I, B, T) surface. Through measurements of the resistance under DC bias of TES devices of various sizes, with different stripe patterns and dimensions, we will discuss how these stripes can affect the R(I, B, T) surface. In addition, using measurements and analysis of the noise spectra of various devices we will present how these changes to the stripe pattern may affect the performance of the TES. In particular, we will discuss strategies to reduce the presence of localized discontinuities in the derivative of R, associated with increased noise, while maintaining the globally low levels of unexplained noise currently achieved with conventional metal stripe patterns. Implementing these strategies is a path towards producing large arrays with highly uniform transitions and high spectral resolution. These large uniform arrays will be required for future x-ray astronomy applications, such as the X-IFU on ATHENA.

We have been developing superconducting transition-edge sensor (TES) microcalorimeters for a variety of potential astrophysics missions, including Athena. The X-ray Integral Field Unit (X-IFU) instrument on this mission requires close-packed pixels on a 0.25 mm pitch, and high quantum efficiency between 0.2 and 12 keV. The traditional approach within our group has been to use square TES bilayers on molybdenum and gold that are between 100 and 140 microns in size, deposited on silicon nitride membranes to provide a weak thermal conductance to a 50 mK heat bath temperature. It has been shown that normal metal stripes on top of the bilayer are needed to keep the unexplained noise at a level consistent with the expected based upon estimates for the non-equilibrium non-linear Johnson noise.In this work we describe a new approach in which we use a square TES bilayer that is 50 microns in size. While the weak link effect is much stronger in this size of TES, we have found that excellent spectral performance can be achieved without the need for any normal metal strips on top of the TES. A spectral performance of 1.58 eV at 6 KeV has been achieved, the best resolution seen in any of our devices with this pixel size. The absence of normal metal stripes has led to more uniform transition shapes, and more reliable excellent spectral performance. The smaller TES size has meant that that the thermal conductance to the heat bath, determined by the perimeter length of the TES and the membrane thickness, is lower than on previous devices, and thus has a lower count rate capability. This is an advantage for low count-rate applications where the slower speed enables easier multiplexing in the read-out, thus potential higher multiplexing factors. In order to recover the higher count rate capabilities, a potential path exits using thicker silicon nitride membranes to increase the thermal conductance to the heat bath.

We have developed large-format, close-packed X-ray microcalorimeter arrays fabricated on solid substrates, designed to achieve high energy resolution with count rates up to a few hundred counts per second per pixel for X-ray photon energies upto 8 keV. Our most recent arrays feature 31-micron absorbers on a 35-micron pitch, reducing the size of pixels by about a factor of two. This change will enable an instrument with significantly higher angular resolution. In order to wire out large format arrays with an increased density of smaller pixels, we have reduced the lateral size of both the microstrip wiring and the Mo/Au transition-edge sensors (TES). We report on the key physical properties of these small TESs and the fine Nb leads attached, including the critical currents and weak-link properties associated with the longitudinal proximity effect.

The X-ray integrated field unit (X-IFU) in European Space Agency's (ESA's) Athena mission will be the first high-resolution X-ray spectrometer in space using a large-format transition-edge sensor microcalorimeter array. Motivated by optimization of detector performance for X-IFU, we have conducted an extensive campaign of parametric characterization on transition-edge sensor (TES) detectors with nominal geometries and physical properties in order to establish sensitivity trends relative to magnetic field, dc bias on detectors, operating temperature, and to improve our understanding of detector behavior relative to its fundamental properties such as thermal conductivity, heat capacity, and transition temperature. These results were used for validation of a simple linear detector model in which a small perturbation can be introduced to one or multiple parameters to estimate the error budget for X-IFU. We will show here results of our parametric characterization of TES detectors and briefly discuss the comparison with the TES model.

We are exploring the properties of electron-beam evaporated molybdenum thin films on silicon nitride coated silicon wafers at substrate temperatures between room temperature and 650 C. The temperature dependence of film stress, transition temperature, and electrical properties are presented. X-ray diffraction measurements are performed to gain information on molybdenum crystallite size and growth. Results show the dominant influence of the crystallite size on the intrinsic properties of our films. Wafer-scale uniformity, wafer yield, and optimal thermal bias regime for TES fabrication are discussed.

We develop superconducting transition-edge sensor (TES) microcalorimeter focal planes for versatility in meeting the specifications of X-ray imaging spectrometers, including high count rate, high energy resolution, and large field of view. In particular, a focal plane composed of two subarrays: one of fine pitch, high count-rate devices and the other of slower, larger pixels with similar energy resolution, offers promise for the next generation of astrophysics instruments, such as the X-ray Integral Field Unit Instrument on the European Space Agencys ATHENA mission. We have based the subarrays of our current design on successful pixel designs that have been demonstrated separately. Pixels with an all-gold X-ray absorber on 50 and 75 micron pitch, where the Mo/Au TES sits atop a thick metal heatsinking layer, have shown high resolution and can accommodate high count rates. The demonstrated larger pixels use a silicon nitride membrane for thermal isolation, thinner Au, and an added bismuth layer in a 250-sq micron absorber. To tune the parameters of each subarray requires merging the fabrication processes of the two detector types. We present the fabrication process for dual production of different X-ray absorbers on the same substrate, thick Au on the small pixels and thinner Au with a Bi capping layer on the larger pixels to tune their heat capacities. The process requires multiple electroplating and etching steps, but the absorbers are defined in a single-ion milling step. We demonstrate methods for integrating the heatsinking of the two types of pixel into the same focal plane consistent with the requirements for each subarray, including the limiting of thermal crosstalk. We also discuss fabrication process modifications for tuning the intrinsic transition temperature (T(sub c)) of the bilayers for the different device types through variation of the bilayer thicknesses. The latest results on these 'hybrid' arrays will be presented.

Four astrophysics missions are currently being studied by NASA as candidate large missions to be chosen inthe 2020 astrophysics decadal survey.1 One of these missions is the X-Ray Surveyor (XRS), and possibleconfigurations of this mission are currently under study by a science and technology definition team (STDT). Oneof the key instruments under study is an X-ray microcalorimeter, and the requirements for such an instrument arecurrently under discussion. In this paper we review some different detector options that exist for this instrument,and discuss what array formats might be possible. We have developed one design option that utilizes eithertransition-edge sensor (TES) or magnetically coupled calorimeters (MCC) in pixel array-sizes approaching 100kilo-pixels. To reduce the number of sensors read out to a plausible scale, we have assumed detector geometriesin which a thermal sensor such a TES or MCC can read out a sub-array of 20-25 individual 1 pixels. In thispaper we describe the development status of these detectors, and also discuss the different options that exist forreading out the very large number of pixels.