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Fluxonium qubits are recognized for their high coherence times and high operation fidelities, attributed to their unique design incorporating over 100 Josephson junctions per superconducting loop. However, this complexity poses significant fabrication challenges, particularly in achieving high yield and junction uniformity with traditional methods. Here, we introduce an overlap process for Josephson junction fabrication that achieves nearly 100% yield and maintains uniformity across a 2-inch wafer with less than 5% variation for the phase slip junction and less than 2% for the junction array. Our compact junction array design facilitates fluxonium qubits with energy relaxation times exceeding 1 millisecond at the flux frustration point, demonstrating consistency with state-of-the-art dielectric loss tangents and flux noise across multiple devices. This work suggests the scalability of high coherence fluxonium processors using CMOS-compatible processes, marking a significant step towards practical quantum computing.

The fluxonium qubits have emerged as a promising platform for gate-based quantum information processing. However, their extraordinary protection against charge fluctuations comes at a cost: when coupled capacitively, the qubit-qubit interactions are restricted to XX-interactions. Consequently, effective XX- or XZ-interactions are only constructed either by temporarily populating higher-energy states, or by exploiting perturbative effects under microwave driving. Instead, we propose and demonstrate an inductive coupling scheme, which offers a wide selection of native qubit-qubit interactions for fluxonium. In particular, we leverage a built-in, flux-controlled ZZ-interaction to perform qubit entanglement. To combat the increased flux-noise-induced dephasing away from the flux-insensitive position, we use a continuous version of the dynamical decoupling scheme to perform noise filtering. Combining these, we demonstrate a 20 ns controlled-Z (CZ) gate with a mean fidelity of 99.53%. More than confirming the efficacy of our gate scheme, this high-fidelity result also reveals a promising but rarely explored parameter space uniquely suitable for gate operations between fluxonium qubits.