1. Plasma-Enhanced Chemical Vapour Deposition of Amorphous Se Films
- Author
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Nagels, P., Sleeckx, E., Callaerts, R., Nagels, P., Sleeckx, E., and Callaerts, R.
- Abstract
The preparation of layers of amorphous Se by plasma-enhanced CVD using the hydride H2Se as precursor gas is described. Using a mixture of 15 vol.% H2Se in H2, partly crystallized films were obtained. Information concerning the structure of the films was obtained from Raman spectroscopy. The spectra of amorphous Se indicated that the dominant molecular structure is the eight-membered ring and/or a chain with Se8molecular fragments. The optical transmission spectrum was recorded at different temperatures in the range 77-300 K. The optical bandgap ETwas calculated from the optical absorption coefficients α using Tauc law : αν=C(hν-Er)2, where hν is the photon energy. The temperature dependence of ETcan be approximated by a linear relation : [MATH].
- Published
- 1995
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