1. Structural, Optical, and Thermoelectric Properties of the ZnO:Al Films Synthesized by Atomic Layer Deposition
- Author
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Tambasov, I. A., Volochaev, M. N., Voronin, A. S., Evsevskaya, N. P., Masyugin, A. N., Aleksandrovskii, A. S., Smolyarova, T. E., Nemtsev, I. V., Lyashchenko, S. A., Bondarenko, G. N., and Tambasova, E. V.
- Abstract
Abstract: Aluminum-doped zinc oxide thin films have been grown by atomic layer deposition at a temperature of 200°C. Using X-ray diffraction, it has been established that the ZnO:Al thin films exhibits the reflections from the (100), (002), (110), and (201) ZnO hexagonal phase planes. The (101) and (102) planes have also been detected by electron diffraction. The ZnO:Al thin films grow smooth with a root-mean-square roughness of R
q = 0.33 nm and characteristic nanocrystallite sizes of ~70 and ~15 nm without additional aluminum or aluminum oxide phases. The transmission at a wavelength of 550 nm with regard to the substrate has been found to be 96%. The refractive indices and absorption coefficients of the ZnO:Al thin films in the wavelength range of 250–900 nm have been determined. The maximum refractive indices and absorption coefficients have been found to be 2.09 at a wavelength of 335 nm and 0.39 at a wavelength of 295 nm, respectively. The optical band gap is 3.56 eV. The resistivity, Seebeck coefficient, and power factor of the ZnO:Al thin films are ~1.02 × 10–3 O cm, –60 µV/K, and 340 µW m–1 K–2 at room temperature, respectively. The maximum power factor attains 620 µW m–1 K–2 at a temperature of 200°C.- Published
- 2019
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