1. Fabrication of Capacitive Micromachined Ultrasonic Transducer (CMUT) With PMMA/Graphene Membrane
- Author
-
Liu, Jie, Liu, Xinyue, Luo, Youming, Hassan, Atazaz, Li, Yuyao, and Chen, Quanfang
- Abstract
An experimental study of a capacitive micromachined ultrasonic transducer (CMUT) made from a polymethyl methacrylate (PMMA)/graphene composite membrane is presented. Graphene has superior electrical and mechanical properties that make it desirable for sensing and micro-electro-mechanical systems (MEMS) applications. The novel aspect of this technique is that it fabricates CMUTs from the PMMA/graphene membrane rather than the more common silicon-based membrane. The PMMA/graphene membrane comprised bilayer graphene and 320 nm of PMMA layer. The CMUT was formed by transferring a PMMA/graphene membrane over SU-8 patterned circular cavities with diameters of
$60~\mu \text{m}$ $724.6~\Omega /\square $ - Published
- 2023
- Full Text
- View/download PDF