8 results on '"Kamberian, Henry"'
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2. Use of advanced data modeling to introduce and extend mask tools serving mainstream application
3. EUVL mask process development and verification using advanced modeling and characterization techniques
4. EUV mask challenges and requirements for ultimate single exposure interconnects
5. Mask manufacturing of advanced technology designs using multi-beam lithography (part 2)
6. Measurement of through-focus EUV pattern shifts using the SHARP actinic microscope
7. EUV mask manufacturing readiness in the merchant mask industry
8. Mask manufacturing of advanced technology designs using multi-beam lithography (Part 1)
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